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Kurt Lesker PVD75 ebeam and thermal deposition system

Kurt Lesker PVD75 ebeam and thermal deposition system

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Description

Kurt Lesker PVD75 ebeam and thermal deposition system

  • Barely used Kurt Lesker PVD75
  • KLE06 e-beam source with 4 pockets x 8cc, 5KW power supply
  • 2X thermal source
  • Standard thermal power supply up to 12V or 400A, max 2kW applied power
  • rotating platten for max 8″ wafer
  • deposition shields
  • Quartz lamp substrate heaters (2)
  • Flip shutter
  • quartz crystal thickness monitor (3)
  • CTI 8F Cryo pump/compressor with 25′ lines
  • Edwards XDS10 roughing scroll pump
  • 208v, 3 phase 50/60

Please contact us if you are interested in the item. This item is only for end users and are subject to sale without notice. Appreciate your time.

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