KLA Tencor Sensarray 2030B-0027 LCD Panel Wafer Process Probe point Instrumented

The Process Probe 2030 factory-instrumented glass panels enable in situ characterization of glass temperature profiles for CVD, PVD, and a wide range of other flat panel processing applications. The Process Probe 2030 is ideal for LCD systems processing panels up to Generation 4 that can be instrumented at the SensArray division’s manufacturing facility.
By embedding thermocouple (TC) sensors inside the glass using our patented ThermaBond™ technique, the Process Probe 2030 delivers the highest absolute accuracy for measuring the true substrate temperature. Accuracy is also enhanced by the use of thin, 3 mil TC wire, which minimizes heat loss through the leads.

More info here: http://www.kla-tencor.com/Instrumented-Substrates/2030.html