Description
Jipelec JETSTAR RTP Furnace
Condition: Used.
This is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
Info from OEM for your reference: JETSTAR is the Jipelec software-controlled standalone-type rapid thermal annealing (RTA) system dedicated to research-to-production applications. JETSTAR has been specially developed to meet R&D unit requirements involved in the development and qualification of industrial processes while managing their implementation in production. In a standard model, this RTP furnace is equipped with a manual loading/unloading system for the post-production stage. It then can be easily upgraded with an automated cassette-to-cassette loadlock or a cluster introduction module for fast and easy move to the fabrication area. The multi zone control for enhanced temperature uniformity associated with pyrometer, thermocouple temperature sensors and PID temperature controller provide highly accurate and reproducible thermal performance at any temperature.
ID-AD2020
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