Description
GEN II MBE SYSTEM REACTOR
- 2″ WAFER
- USED FOR InAlGaAs
- ALL SOURCES ARE 2.75″ FLANGE
- WAGON WHEEL PREP CHAMBER HAS AUGER ANALYSIS
- AUXILIARY CHAMBER FOR OUT-GASSING
- MANUAL VALVE ARSENIC CRACKER
- SOURCES: Al, Ga1, Ga2, In
- Si & Be DOPANT SOURCES
- FUNCTIONAL RHEED AND QMS
- THREE ION PUMPS
- TURBO AND SCROLL PUMPS FOR LOAD LOCK
- CRYO PUMP AND COMPRESSOR
- Ti BALL PUMP
- BAKE OUT PANELS
Valid Time: Subject to prior sale without notice.
SS171557076835
