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Drytek DRIE-100

Equipment Inventory (Updated)

Categories: Lab Equipment and Parts, Resell Products Tag: Drytek

Description

Description

Please contact us for the availability of the Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System. The items are subject to prior sale without notice. The items are only for end users.

Location: USA

Quantity: 1 set available

Condition: Used. We can sell them at : (1) AS IS condition, (2) Complete, working, functional test condition.

Info below from website for your reference only.

Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
Low energy etching for minimal substrate damage.
Excellent selectivity, e.g., 20:1 poly Si:SiO2
Laser interferometer for etch rate determination and end-point detection.
Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit
Various Accessories & Wafer Holders Included
Complete Manuals Included

ID-SS380EB

Recommended Hot Equipment

Metrology | Tester | Wafer Carriers
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