Description
CVC Products 2800 Load Lock Dual Process Chamber Sputtering System with Handler
System controls are PLC driven multiple process program menus along with a series of color
graphic display screens using the Multiview Control Software Interface.
Provides Real Time Display of system status, bar graphs and programmed values.
Chamber Process Gases:
- Three (3) Mass Flow Controllers Availabl
- Argon
- Nitrogen
- Oxygen
Load Lock Chamber:
- Ion Mill
- IonMill rate is approximately 50 Angstroms per minute
- Has Chamber Heater
- Operating Temperature is approximately 250 degrees Celsius
Process Chamber 1:
- Has Three (3) Targets
- Titanium
- Ti-W (10% wt Titanium to 90% wt Tungsten)
- Nickel
- Has 1 RF Power Supply
Process Chamber 2:
- Has Three (3) Targets
- Aluminum
- Tantalum
- Titanium
This is subject to prior sale. This is only for end user. Appreciate your time.
Condition: We can sell it at AS IS or complete, working, functional test.
Location: USA
1 | 1 1/2-316L-7 SANITARY STAINLESS FERRULE 1-1/2IN |
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3 | 1″ Base plate Stainless Feed Through 3/4 inside diameter |
4 | 1″ Base plate Stainless High Vacuum feed through to 1/8” Female NPT feedthru |
5 | 1″ Stainless Baseplate Vacuum Feedthru Liquid 1/4″ tube weld x 1/4″ Compression |
6 | 1″ TUBE to 1″ COMPRESSION PORT Brass Nut w/ SS tube |
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SS380EB