Description
4-Wave Z-Flex Ion Beam Deposition IBD / IBE 4-Target Load Locked Etch System
Location: USA
Tool Name & Model: Z-Flex
Maker: 4-Wave
Valid Time: Subject to prior sale without notice. Appreciate your time.
Info on the system from the owner:
- Current configuration is focused on ultra pure depositions that utilize a specially designed high uniformity low energy etch assist package.
- System is currently set up with 4 10″ targets.
- Targets included are Si, Ti, Al & Cr.
- System can be used for super thin, high uniformity coatings on wafers, optics, etc.
- System is fully functional with very little use
- Vintage:2015
The tool may be subject to the export control laws of the United States and other countries. Buyer will comply with the restrictions of the laws and might need to sign the “Customer Statement” before PO. The trademarks of the equipment and parts contained in these documents belonged to the Original Equipment Manufacturers.
SSEB380
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