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Parts for Lam AMAT Tegal Tel equipment

Parts for Lam AMAT Tegal Tel equipment

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Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

OEM
OEM-Part-Number
Part-Description
Tegal 37-221-001 Upper Electrode
Tegal 37-221-002 Upper Electrode
Tegal 39-927-007 Tegal 903e lower electrode
Tegal 39-927-008 Tegal 903e lower electrode
Tegal 37-221-003 Upper Electrode
Tegal 39-680-003 Upper Electrode
Tegal 39-733-004 Tegal 903e lower electrode
Tegal 39-735-003 Tegal 903e lower electrode
Tegal 39-735-004 Tegal 903e lower electrode
Tegal 39-741-009 Tegal 903e lower electrode
Tegal 39-741-010 Tegal 903e lower electrode
Tegal 39-741-026 Tegal 903e lower electrode
AMAT 0020-00991 Hex Cover 150mm
AMAT 0020-06231 Hex Cover 125mm
AMAT 0020-10936 Blocker Plate 200mm
AMAT 0020-10771 TEOS Perf Plate 150mm
AMAT 0020-27205 Titanium Clamp Ring 200mm
AMAT 0020-27207 Titanium Clamp Ring 150mm
AMAT 0020-23811 Collimator .625 thick
AMAT 0020-24812 Collimator .750 thick
AMAT 0020-30086 Perf Plate 150mm
AMAT 0020-30195 Cover
AMAT 0020-30111 Blocker Plate 200mm
AMAT 0020-30406 Perf Plate 150mm
AMAT 0020-06447 Insulator Cap
AMAT 0020-30407 Perf Plate 200mm
AMAT 0020-30446 Blocker Plate 125mm
AMAT 0020-30580 Blocker Plate 150mm
AMAT 0020-30797 Perf Plate 200mm
AMAT 0020-30816 Gas Distribution Plate 13 hole
AMAT 0020-30919 Susceptor Plate 200mm
AMAT 0020-31088 Susceptor Plate 200mm
AMAT 0020-31488 Gas Distribution Plate 13 hole
AMAT 0020-31490 Gas Distribution Plate 37 hole
AMAT 0020-31492 Gas Distribution Plate 101 hole
AMAT 0020-06754 Hex Cover 100mm
AMAT 0020-31493 Gas Distribution Plate 133 hole
AMAT 0020-31547 Gas Distribution Plate 101 hole
AMAT 0020-31548 Gas Distribution Plate 133 hole
AMAT 0020-31620 Susceptor Plate 200mm
AMAT 0020-31789 Cover
AMAT 0020-31804 Gas Distribution Plate 80 hole
AMAT 0020-31831 Chamber Lid
AMAT 0020-32318 Gas Distribution Plate 37 hole
AMAT 0020-32036 Blocker Plate 200mm
AMAT 0020-32259 Gas Distribution Plate 119 hole
AMAT 0020-09933 Gas Plate
AMAT 0020-32260 Gas Distribution Plate 37 hole
AMAT 0020-32262 Gas Distribution Plate 133 hole
AMAT 0020-32263 Gas Distribution Plate 145 hole
AMAT 0020-33366 Blocker Plate 200mm
AMAT 0020-32952 Susceptor Plate 200mm
AMAT 0020-33538 Perf Plate
AMAT 0020-33998 Chamber Liner
AMAT 0020-34293 Chamber Lid
AMAT 0020-34297 Chamber Lid
AMAT 0020-34444 Face Plate 200mm
AMAT 0020-10117 TEOS Perf Plate 200mm
AMAT 0020-34445 Blocker Plate 200mm
AMAT 0020-34775 Blocker Plate 200mm
AMAT 0020-34606 Blocker Plate 200mm
AMAT 0020-42285 Blocker Plate 200mm
AMAT 0020-42287 Perf Plate 200mm
AMAT 0020-44453 Blocker Plate 300mm
AMAT 0020-48891 Blocker Plate 300mm
AMAT 0020-49785 Face Plate 300mm
AMAT 0020-47008 300mm Blocker Plate
AMAT 0020-48972 Face Plate 300mm
AMAT 0020-10119 Perf Plate 150mm
AMAT 0020-51923 Face Plate 300mm
AMAT 0020-52120 Blocker Plate 300mm
AMAT 0020-60007 Susceptor Plate 125mm
AMAT 0020-60033 Susceptor Plate 150mm
AMAT 0020-62625 Face Plate 300mm
AMAT 0020-70842 Blocker Plate 300mm
AMAT 0020-84596 Face Plate 300mm
AMAT 0020-94081 300mm Blocker Plate
AMAT 0021-00041 Face Plate 200mm
AMAT 0021-00042 Face Plate
AMAT 0020-10120 TEOS Perf Plate 150mm
AMAT 0021-01273 Chamber Liner
AMAT 0021-01569 Blocker Plate 200mm
AMAT 0021-01572 Face Plate 200mm
AMAT 0021-01813 Face Plate 200mm
AMAT 0021-02306 Face Plate 200mm
AMAT 0021-03568 Face Plate 200mm
AMAT 0021-03637 Face Plate
AMAT 0021-07939 Perf Plate 300mm
AMAT 0021-09007 Chamber Lid
AMAT 0021-09008 Chamber Lid
AMAT 0020-10122 Perf Plate 125mm
AMAT 0021-09909 Face Plate 200mm
AMAT 0021-09914 Blocker Plate 200mm
AMAT 0021-12790 Blocker Plate 300mm
AMAT 0021-14590 300mm Face Plate
AMAT 0021-15200 Face Plate 200mm
AMAT 0021-17989 Face Plate 300mm
AMAT 0021-38119 Face Plate 200mm
AMAT 0021-53284 Titanium Ring
AMAT 0021-61344 300mm Blocker Plate
AMAT 0040-08492 300mm Face Plate
AMAT 0020-10204 Susceptor Plate 200mm
AMAT 0040-33998 Chamber Liner
AMAT 0040-87765 300mm Face Plate
AMAT 0040-95463 300mm Face Plate
LAM 713-018426-369 Insert, Vespel Ring
LAM 713-028487-001 Confindment Vespel Ring
LAM 715-011531-014 Electrode 8″,
LAM 715-011531-015 Electrode 6″
LAM 715-011531-102 Electrode 6″
LAM 715-011640-005 Focus Ring 4″
LAM 715-011640-006 Focus Ring 6″, Rainbow
LAM 715-011673-105 Lower Electrode 5″,
LAM 715-011746-141 Plate Wafer Clamp 4″
LAM 715-011746-151 Plate Wafer Clamp 5″
LAM 715-011746-161 Plate Wafer Clamp 6″
LAM 715-018991-206 Electrode Upper 6″
LAM 715-018991-208 Electrode Upper 8″
LAM 715-018991-006 Electrode Upper 8″
LAM 715-028087-005 Shroud 6″ 2 mil hard
LAM 715-028559-001 Showerhead 6″
LAM 715-028606-161 Wafer Clamp 6″
LAM 715-030320-001 BSR Injection Ring
LAM 715-28608-161 Non-Contact Wafer Clamp
LAM 715-31752-206 Electrode Lower 6″
LAM 715-31752-208 Electrode Lower 8″
LAM 715-330000-090 Gas Injection Ring
LAM 715-007469-002 Lower Electrode 6″, 4 pin
LAM 715-330135-001 BSR Injection Ring
LAM 715-330984-001 BSR Injection Ring
LAM 715-330987-001 BSR Injection Ring
LAM 715-11986-108 Lower Elctrode
LAM 715-008721-001 Electrode 6″
LAM 715-011531-008 Electrode 6″
LAM 715-011531-009 Electrode 8″
LAM 715-011531-012 Electrode
LAM 715-007469-001 Lower Electrode 6″, 4 pin
LAM 715-007469-102 Lower Electrode 6″, 4 pin
LAM 715-007025-001 Electrode
Tel 1D10-100854-15 DRM2 BAFFLE PLATE
Tel 1D10-101398-11 BAFFLE PLATE
Tel 1D10-101475-11. BAFFLE PLATE
Tel 1D10-101551-11 BAFFLE PLATE
Tel 1D10-102848-13 BAFFLE PLATE Y203
Tel 1D10-200734-14 COVER BELLOW
Tel 1D10-202177-12 UPPER ELECTRODE, VESPEL INSERT
Tel 1D10-201429-15 UPPER ELECTRODE
Tel 1D10-201588-12 UPPER ELECTRODE W/MONITOR
Tel 1D10-202204-12 UPPER ELECTRODE, VESPEL INSERT, W/MONITOR
Tel 1D10-202988-11 DRM2 COVER BELLOW
Tel 1D10-204418-12 BELLOW COVER Y203
Tel 1D10-204419-12 BELLOW COVER Y203
Tel 1D10-204338-13 UPPER ELECTRODE Y203
Tel 1D10-303124-21 DRM2 DEPO SHIELD
Tel 1D10-309697-11 DEPO WINDOW
Tel 1D10-315183-15 DEPO SHIELD Y203


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