Description
SCREEN SOKUDO DT-3000 SOKUDO DUO 300mm Coat Develop Track
Equipment ID: ID-SS11220-S-1A
SCREEN / SOKUDO DT-3000 SOKUDO DUO coat/develop track for 300 mm wafer photolithography. The system was manufactured in 2013 and originally configured for MAPPER Lithography.
According to the seller, this system is New Old Stock (NOS) — never installed, never electrically powered, and never exposed to process chemicals. It has been stored indoors and remains in its original transport crates in Białystok, Poland.
System Specifications
| Manufacturer | SCREEN Semiconductor Solutions / SOKUDO |
| Model | DT-3000 |
| Commercial Name | SOKUDO DUO |
| Equipment Type | Coat / Develop Track |
| Wafer Size | 300 mm |
| Architecture | Dual-track / two parallel process lines |
| Process Functions | Photoresist coating, thermal processing / bake, development |
| Applications | Immersion ArF, E-Beam and Directed Self-Assembly (DSA) |
| Throughput | More than 450 wafers/hour, process and configuration dependent |
| Year | 2013 |
| Country of Manufacture | Japan |
| Original Application | MAPPER Lithography |
| Condition | New Old Stock / Unused — seller reported |
| Location | Białystok, Poland |
| Availability | Immediate, crated |
| Equipment ID | ID-SS11220-S-1A |
Condition
According to information provided by the seller:
- The system has never been installed.
- The system has never been electrically powered.
- The system has never been exposed to process chemicals.
- It has been stored in heated, climate-controlled indoor storage.
- The original transport packaging has been retained.
- The TiltWatch XTR and ShockWatch L-65 25G transport indicators are reported as intact and not triggered.
- The system is currently crated and available for inspection in Poland.
Shipping Information
The system is stored in four original transport crates with an approximate total gross weight of 2,230 kg.
Important Note
Because this equipment has been in long-term storage, commissioning inspection is recommended before operation. The final buyer should confirm the exact installed configuration, software, controller status, scanner interface, utility requirements, chemical configuration and module inventory for the intended application.
Additional Documentation
For qualified buyers, additional information may be available, including module inventory, packing list, build documentation, software information, utility requirements, facility interface drawings, nameplate photographs and additional high-resolution images.
An on-site inspection in Poland may also be arranged for qualified buyers.
Interested in This Equipment?
Please contact SemiStar and provide your intended application, destination country and required configuration. We will confirm availability and additional technical information.