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Lam AMAT TEL RF Matching

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We are dedicated to the continuous improvement and cost-reduction efforts of our customers by providing innovative products and services. We repair and refurbishment services on Lam Research equipment/modules/components/Parts. This includes Pumps/Chiller/TCUs, mechanical/transport assemblies, valves, the following RF matches, RF generatorsPCBs/ESC & DC Power Suppliers etc.. We also provide on-site technical support services and refurbishes, installs and sells Lam Research equipment, modules/components/Parts . These are only for end user and they are subject to prior sales. Check for Exchange Availability.

  1. TEL / ENI Match: MWD-25-LD; ESI1D80-000646-161
  2. AMAT / Applied Match: 0010-04137; 0010-09416; 0010-09417; 0010-09490; 0010-09750
  3. AMAT High Efficiency Match: 0010-30686
  4. LAM DSQ Match: 853-025735-001; 853-025735-004; 853-025735-008
  5. LAM LOFAT Match:853-025903-001; 853-025903-002
  6. LAM Mini Match: 853-015130-002; 853-015130-003; 853-015130-004; 853-015130-006; 853-015130-102; 853-015130-103; 853-015130-202; 853-015130-204; 853-015130-202; 853-015130-205; 853-015130-205; 853-330951-001; 853-330951-021; 853-025083-001; 853-025083-002; 853-025083-003; 853-025083-004; 853-025083-022; 853-015130-204; 853-330951-001
  7. LAM Upper Match (T-Match):853-032294-001; 853-032294-002; 853-032294-003; 853-032294-004
  8. LAM Upper Match (TCP 9600): 853-032190-006; 853-032190-008; 853-032190-306

All the Lam, AMAT, Tel  plasma etcher equipment  trademarks belongs to Lam Research, AMAT, TEL , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved. 

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers