Description
MRL Industries Bandit 218 LPCVD Furnace
Location: CA, U.S.A.
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
- 200mm LPCVD furnace
- 2 Kashiyama vacuum pumps with blowers
- Schumacher M-Dot dopant source controller
- furnace dims: 66x36x78
- gas module dims: 18x36x78
- power req: 480v, 250amps max
- tube 1: TEOS/anneal
- tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
SS7270-1-2-1-1 and SS7270W