Description
Tegal Spare Parts in stock for Tegal 901e , Tegal 903e , Tegal 901 , Tegal 903 , Tegal 981e , Tegal 983e , Tegal 700 , Tegal 701 , Tegal 703 , Tegal 801 , Tegal 803 , Tegal 421 , Tegal 415 , Tegal 965 , Tegal 915 ,Tegal 1500e , Tegal 1501e , Tegal 1503e , Tegal 1600 , Tegal 1601e , Tegal 1611 , Tegal 1612 , Tegal 1603e , Tegal 6000 , Tegal 6500 , Tegal 6510 .
You can use “Ctrl”+”F” to search Part No. at this page easily.
Part No. | Part No. | Part No. | Part No. |
20-001-043 | 46-511-001 | 80-195-181 | 80-530-133 |
29-146-001 | 46-527-001 | 80-195-191 | 80-530-135 |
30-070-002 | 46-571-001 | 80-195-199 | 80-530-137 |
30-096-001 | 46-577-001 | 80-195-221 | 80-530-162 |
30-096-003 | 46-618-002 | 80-195-238 | 80-530-174 |
30-131-002 | 49-007-001 | 80-195-239 | 80-561-011 |
30-231-001 | 49-019-001 | 80-195-259 | 80-620-006 |
30-235-003 | 49-020-001 | 80-195-278 | 80-620-021 |
30-251-001 | 49-025-001 | 80-195-285 | 80-620-024 |
31-001-001 | 49-031-001 | 80-195-285SS | 80-640-018 |
31-002-001 | 49-046-002 | 80-195-287 | 80-640-019 |
31-165-001 | 49-047-001 | 80-195-310 | 80-645-011 |
31-232-001 | 50-014-001 | 80-195-312 | 80-645-014 |
31-277-001 | 50-016-001 | 80-195-316 | 80-645-021 |
31-319-001 | 50-022-001 | 80-195-323 | 80-650-001 |
31-362-001 | 50-039-001 | 80-195-325 | 80-650-029 |
33-027-002 | 51-084-001 | 80-195-357 | 80-650-030 |
33-028-001 | 51-092-001 | 80-197-001 | 80-650-031 |
33-041-002 | 51-106-001 | 80-197-004 | 80-650-036 |
33-104-001 | 51-114-001 | 80-197-013 | 80-650-047 |
33-167-004 | 51-147-001 | 80-197-014 | 80-650-053 |
33-212-001 | 51-148-001 | 80-197-032 | 80-660-012 |
33-333-004 | 51-150-001 | 80-197-038 | 80-660-018 |
33-337-001 | 51-151-001 | 80-197-040 | 80-670-018 |
33-342-001 | 51-182-001 | 80-197-041 | 80-671-006 |
38-019-001 | 52-045-001 | 80-197-046 | 80-671-007 |
38-020-001 | 52-046-001 | 80-197-049 | 80-671-012 |
38-848-004 | 52-047-002 | 80-198-033 | 80-671-034 |
38-900-001 | 52-048-001 | 80-198-045 | 80-671-056 |
39-021-001 | 52-054-001 | 80-198-055 | 80-671-057 |
39-028-001 | 52-058-002 | 80-198-056 | 80-671-058 |
39-113-003 | 52-058-006 | 80-198-089 | 80-671-059 |
39-115-001 | 52-059-001 | 80-200-024 | 80-671-064 |
39-139-001 | 52-060-001 | 80-200-040 | 80-671-065 |
39-142-002 | 52-062-001 | 80-200-057 | 80-671-066 |
39-256-001 | 52-063-001 | 80-200-075 | 80-671-066G |
39-292-003 | 54-001-001 | 80-200-087 | 80-671-067 |
39-306-001 | 54-001-002 | 80-200-104 | 80-671-068 |
39-336-018 | 56-009-001 | 80-200-122 | 80-671-069 |
39-340-002 | 56-039-001 | 80-200-122 | 80-671-070 |
39-341-002 | 56-042-001 | 80-200-183 | 80-671-071 |
39-343-001 | 57-028-001 | 80-200-185 | 80-671-072 |
39-344-001 | 59-008-001 | 80-200-187 | 80-678-004 |
39-350-002 | 59-011-001 | 80-200-188 | 80-678-011 |
39-352-100 | 80-041-000 | 80-200-195 | 80-678-013 |
39-360-002 | 80-041-001 | 80-200-210 | 80-678-029 |
39-376-001 | 80-041-003 | 80-200-216 | 80-679-001 |
39-376-002 | 80-055-048 | 80-200-275 | 80-679-012 |
39-379-001 | 80-055-140 | 80-200-302 | 80-680-028 |
39-409-001 | 80-080-028 | 80-200-304 | 80-680-032 |
39-420-002 | 80-080-029 | 80-200-305 | 80-680-040 |
39-424-001 | 80-080-031 | 80-200-314 | 80-680-056U |
39-428-001 | 80-080-036 | 80-200-344 | 80-680-095 |
39-429-001 | 80-080-038 | 80-200-396 | 80-680-100 |
39-436-001 | 80-080-041 | 80-200-422 | 80-680-144 |
39-437-001 | 80-080-054 | 80-202-005 | 80-680-163 |
39-443-001 | 80-080-085 | 80-202-010 | 80-700-009 |
39-450-001 | 80-080-093 | 80-202-027 | 80-700-010 |
39-459-003 | 80-095-001 | 80-202-034 | 80-700-012 |
39-524-001 | 80-095-007 | 80-202-043 | 80-700-046 |
39-533-001 | 80-095-010 | 80-202-046 | 80-700-124 |
39-561-001 | 80-095-012 | 80-202-060 | 80-700-125 |
39-563-001 | 80-095-017 | 80-202-061 | 80-700-127 |
39-604-001 | 80-095-019 | 80-202-073 | 80-700-128 |
39-622-001 | 80-095-025 | 80-202-083 | 80-700-131 |
39-628-001 | 80-095-049 | 80-202-095 | 80-700-132 |
39-633-001 | 80-095-057 | 80-202-110 | 80-700-133 |
39-636-001 | 80-095-063 | 80-202-111 | 80-700-143 |
39-637-001 | 80-095-090 | 80-202-112 | 80-700-146 |
39-639-001 | 80-095-107 | 80-202-113 | 80-700-150 |
39-654-001 | 80-095-108 | 80-202-119 | 80-700-153 |
39-655-001 | 80-095-117 | 80-202-120 | 80-700-154 |
39-659-001 | 80-095-185 | 80-202-125 | 80-700-155 |
39-659-002 | 80-095-195 | 80-202-126 | 80-700-156 |
39-662-001 | 80-095-196 | 80-202-127 | 80-700-160 |
39-675-001 | 80-095-197 | 80-202-128 | 80-700-161 |
39-676-001 | 80-095-205 | 80-202-129 | 80-700-162 |
39-680-003 | 80-095-220 | 80-202-130 | 80-700-163 |
39-682-001 | 80-095-255 | 80-202-131 | 80-700-164 |
39-683-001 | 80-095-256 | 80-202-148 | 80-700-166 |
39-687-002 | 80-095-278 | 80-202-154 | 80-700-167 |
39-689-001 | 80-101-006 | 80-202-155 | 80-700-173 |
39-694-001 | 80-107-003 | 80-202-156 | 80-700-174 |
39-696-001 | 80-127-022 | 80-202-183 | 80-700-177 |
39-699-001 | 80-127-023 | 80-202-186 | 80-700-178 |
39-700-007 | 80-127-042 | 80-202-188 | 80-700-180 |
39-707-001 | 80-127-063 | 80-202-190S | 80-700-185 |
39-710-001 | 80-127-101 | 80-202-212 | 80-700-186 |
39-711-001 | 80-127-102 | 80-202-214 | 80-700-188 |
39-725-001 | 80-127-104 | 80-202-219 | 80-700-198 |
39-726-001 | 80-127-105 | 80-202-227 | 80-700-199 |
39-729-001 | 80-127-122 | 80-202-234 | 80-700-201 |
39-731-001 | 80-127-123 | 80-202-236 | 80-700-203 |
39-733-003 | 80-127-124 | 80-202-238 | 80-700-205 |
39-733-004 | 80-127-141 | 80-202-239 | 80-700-206 |
39-735-003 | 80-127-142 | 80-202-242 | 80-700-214 |
39-735-007 | 80-127-143 | 80-202-243 | 80-700-215 |
39-735-008 | 80-127-144 | 80-202-244 | 80-700-218 |
39-750-001 | 80-127-147 | 80-202-246 | 80-700-219 |
39-751-001 | 80-127-161 | 80-202-247 | 80-700-220 |
39-756-002 | 80-127-162 | 80-202-248 | 80-700-221 |
39-757-003 | 80-127-163 | 80-202-250 | 80-700-222 |
39-758-001 | 80-127-164 | 80-202-252 | 80-700-230 |
39-776-001 | 80-127-167 | 80-202-253 | 80-700-231 |
39-797-001 | 80-127-183 | 80-202-256 | 80-700-236 |
39-804-001 | 80-127-262 | 80-202-272 | 80-700-250 |
39-815-001 | 80-127-273 | 80-202-274 | 80-700-254 |
39-815-003 | 80-127-321 | 80-202-284 | 80-700-259 |
39-817-001 | 80-127-325 | 80-202-286 | 80-700-259A |
39-819-001 | 80-127-343 | 80-202-289 | 80-700-261 |
39-833-001 | 80-127-350 | 80-202-290 | 80-700-265 |
39-847-002 | 80-127-361 | 80-202-291 | 80-700-292 |
39-848-003 | 80-127-362 | 80-202-293 | 80-700-293 |
39-848-005 | 80-127-363 | 80-202-294 | 80-700-294 |
39-852-001 | 80-127-364 | 80-202-295 | 80-700-358 |
39-852-002 | 80-127-365 | 80-202-296 | 80-700-359 |
39-852-004 | 80-127-366 | 80-202-298 | 80-700-418 |
39-853-002 | 80-127-367 | 80-202-301 | 80-700-419 |
39-853-004 | 80-127-368 | 80-202-302 | 80-700-585 |
39-854-001A | 80-127-369 | 80-202-312 | 80-710-025 |
39-854-001B | 80-127-370 | 80-202-313 | 80-750-038 |
39-854-001C | 80-127-371 | 80-202-317 | 80-753-001 |
39-855-001 | 80-127-383 | 80-202-319 | 80-753-004 |
39-856-001 | 80-127-384 | 80-202-321 | 80-753-064 |
39-857-001 | 80-127-385 | 80-202-327 | 80-780-001 |
39-858-001 | 80-127-386 | 80-202-328 | 80-812-040 |
39-858-001A | 80-127-421 | 80-202-338 | 80-888-062 |
39-860-001 | 80-127-523 | 80-202-341 | 81-006-010 |
39-868-001 | 80-127-542 | 80-202-350 | 81-006-012 |
39-869-001 | 80-127-561 | 80-202-361 | 81-006-031 |
39-870-001 | 80-127-562 | 80-202-362 | 81-007-015 |
39-872-001 | 80-127-565 | 80-202-367 | 81-007-063 |
39-908-001 | 80-127-641 | 80-202-389 | 81-007-077 |
39-926-001 | 80-127-642 | 80-202-390 | 81-007-099 |
39-927-008 | 80-127-824 | 80-202-391 | 81-007-107 |
39-929-001 | 80-127-825 | 80-202-392 | 81-007-137 |
39-954-001 | 80-127-827 | 80-202-393 | 81-007-138 |
39-954-002 | 80-127-828 | 80-202-394 | 81-007-145 |
39-954-003 | 80-128-065 | 80-202-396 | 81-007-146 |
39-967-002 | 80-128-143 | 80-202-397 | 81-101-014 |
40-003-001 | 80-128-170 | 80-202-402 | 81-101-017 |
40-003-002 | 80-150-011 | 80-202-404 | 81-101-018 |
40-005-001 | 80-150-016 | 80-202-405 | 81-105-207 |
40-007-001 | 80-150-061 | 80-202-408 | 81-105-209 |
40-011-001 | 80-150-116 | 80-202-410 | 81-105-217 |
40-012-001 | 80-150-131 | 80-202-411 | 81-105-227 |
40-017-002 | 80-150-151 | 80-202-413 | 81-105-232 |
40-044-001 | 80-150-172 | 80-202-432 | 81-105-235 |
40-053-001 | 80-150-176 | 80-202-434 | 81-200-021 |
40-065-001 | 80-150-184 | 80-202-436 | 81-200-056 |
40-102-002 | 80-150-206 | 80-202-440 | 83-002-001 |
40-169-001 | 80-150-207 | 80-202-471 | 83-003-001 |
40-177-001 | 80-151-181 | 80-202-494 | 83-004-002 |
40-178-001 | 80-151-185 | 80-210-009 | 83-011-007 |
40-230-001 | 80-152-003 | 80-300-001 | 83-042-001 |
40-242-001 | 80-152-004 | 80-305-001 | 83-084-001 |
40-256-001 | 80-152-006 | 80-305-002 | 83-124-001 |
40-283-04M | 80-152-008 | 80-305-003 | 83-161-001 |
40-286-001 | 80-153-002 | 80-305-004 | 83-176-001 |
40-287-001 | 80-153-004 | 80-305-005 | 83-176-002 |
40-289-001 | 80-159-002 | 80-305-011 | 83-176-003 |
40-290-001 | 80-162-001 | 80-320-005 | 83-176-004 |
40-294-003 | 80-162-002 | 80-320-006 | 83-176-005 |
40-309-001 | 80-162-003 | 80-330-006 | 83-178-001 |
40-349-001 | 80-162-005 | 80-370-008 | 93-027-003 |
40-366-001 | 80-162-006 | 80-370-010 | 93-028-001 |
40-374-003 | 80-162-007 | 80-380-040 | 93-033-005 |
40-374-004 | 80-163-001 | 80-400-025 | 93-033-006 |
40-391-001 | 80-163-002 | 80-400-042 | 93-044-001 |
40-392-001 | 80-163-003 | 80-400-049 | 93-118-002 |
40-395-001U | 80-163-004 | 80-400-057 | 93-137-002 |
40-425-001 | 80-163-005 | 80-400-061 | 93-219-001 |
40-425-002 | 80-163-006 | 80-400-063 | 93-220-001 |
40-516-006 | 80-165-002 | 80-400-065 | 93-498-002 |
40-730-001 | 80-165-003 | 80-400-066 | 93-523-003 |
40-731-001 | 80-165-004 | 80-400-068 | 94-020-001 |
40-926-001 | 80-165-005 | 80-400-073 | 94-131-003 |
41-037-001 | 80-165-008 | 80-400-077 | 94-144-002 |
41-046-001 | 80-165-014 | 80-400-084 | 94-144-002A |
41-047-002 | 80-165-025 | 80-400-090 | 94-176-001 |
41-103-001 | 80-165-026 | 80-400-092 | 94-212-001 |
41-112-001 | 80-165-027 | 80-400-096 | 94-316-001 |
41-115-001 | 80-165-035 | 80-400-097 | 94-450-001 |
41-118-001 | 80-165-036 | 80-400-099 | 98-019-001 |
41-118-002 | 80-170-002 | 80-401-006 | 98-125-008 |
41-118-003 | 80-170-003 | 80-401-008 | 98-172-003 |
41-127-001 | 80-170-013 | 80-401-014 | 98-203-001 |
41-136-003 | 80-170-018 | 80-401-017 | 98-209-001 |
41-136-004 | 80-170-025 | 80-402-042 | 98-223-002 |
41-172-001 | 80-170-028 | 80-402-044 | 98-224-001 |
41-176-001 | 80-170-028A | 80-402-049 | 98-246-001 |
41-177-001 | 80-170-029 | 80-402-073 | 98-247-002 |
41-189-001 | 80-170-042 | 80-405-015 | 98-309-001 |
41-206-001 | 80-170-043 | 80-415-006 | 99-002-004 |
41-207-001 | 80-172-042 | 80-415-007 | 99-003-002 |
41-214-002 | 80-172-048 | 80-415-008 | 99-005-001 |
42-100-001 | 80-172-049 | 80-415-009 | 99-008-001 |
42-185-001 | 80-172-050 | 80-415-012 | 99-013-001 |
42-185-003 | 80-172-052 | 80-415-013 | 99-037-001 |
42-271-005 | 80-172-058 | 80-415-014 | 99-043-002 |
42-281-001 | 80-192-074 | 80-415-018 | 99-044-002 |
42-282-002 | 80-192-112 | 80-415-021 | 99-045-001 |
42-282-003 | 80-192-116 | 80-415-026 | 99-046-001 |
42-285-002 | 80-192-133 | 80-415-028 | 99-046-502 |
42-293-001 | 80-192-139 | 80-415-034 | 99-047-001 |
42-307-001 | 80-192-153 | 80-415-035 | 99-054-001 |
42-328-002 | 80-192-153SS | 80-415-036 | 99-079-001 |
42-331-002 | 80-192-155 | 80-450-021 | 99-079-002 |
42-335-002 | 80-192-159 | 80-450-030 | 99-081-001 |
42-346-002 | 80-192-160 | 80-500-002 | 99-082-004 |
42-360-001 | 80-192-161 | 80-500-008 | 99-095-001 |
42-446-001 | 80-192-162 | 80-505-001 | 99-098-003 |
42-449-001 | 80-192-163 | 80-510-001 | 99-099-001 |
42-456-002 | 80-192-164 | 80-510-013 | 99-104-001 |
42-493-001 | 80-192-165 | 80-510-015 | 99-106-001 |
42-501-001 | 80-192-168 | 80-510-016 | 99-112-001 |
42-509-002 | 80-192-169 | 80-510-023 | 99-114-001 |
42-509-003 | 80-192-182 | 80-520-001 | 99-116-001 |
42-513-002 | 80-195-031 | 80-520-014 | 99-126-003 |
42-532-001 | 80-195-055 | 80-520-015 | 99-139-002 |
42-535-001 | 80-195-096 | 80-520-023 | 99-141-001 |
42-553-001 | 80-195-105 | 80-530-001 | 99-154-001 |
42-583-002 | 80-195-111 | 80-530-012 | 99-158-001 |
42-663-001 | 80-195-119 | 80-530-018 | 99-181-005 |
42-730-001 | 80-195-120 | 80-530-023 | 99-181-006 |
42-790-001 | 80-195-132 | 80-530-032 | 99-186-002 |
44-068-006 | 80-195-133 | 80-530-036 | 99-190-002 |
44-290-001 | 80-195-149 | 80-530-061 | 99-197-001 |
44-332-001 | 80-195-153 | 80-530-064 | 99-206-001 |
44-340-001 | 80-195-154 | 80-530-079 | 99-208-004 |
44-366-001 | 80-195-156 | 80-530-080 | 99-209-001 |
44-369-002 | 80-195-158 | 80-530-087 | 99-232-004 |
44-397-001 | 80-195-159 | 80-530-090 | 99-237-003 |
44-432-002 | 80-195-160 | 80-530-093 | 99-300-001 |
46-115-002 | 80-195-161 | 80-530-105 | 99-304-001 |
46-272-003 | 80-195-162 | 80-530-106 | 99-318-001 |
46-323-001 | 80-195-166 | 80-530-109 | CC 1012-00101 |
46-469-002 | 80-195-167 | 80-530-113 | CC 1106-01101 |
46-475-001 | 80-195-168 | 80-530-128 | CW1078-60XXX |
46-492-001 | 80-195-169 | 80-530-131 | CW110500202 |
Other tegal items which might be available.
1 | 37-221-003 UPPER ELECTRODE |
2 | 39-431-002 / FEEDTHROUGH-RF CERAMIC 39-431-002 / TEGAL |
3 | 39-832-005 ELCTD TEMP CONT ANDZD T/15XXE |
4 | 40-294-003D / CYLINDER, CERAMIC, LOWER ELECTRODE IT900 (4 INCH) / TEGAL |
5 | 40-297-002 QUARTZ PIN 903 |
6 | 40-297-002 Tegal 903e Pin for Plasma Etcher |
7 | 507008615 / AC/DC POWER SUPPLY FOR RF GENERATOR / TEGAL |
8 | 80-095-278RW PCB MICROPRCS CONTROLLER W/SLOW PROM |
9 | 80-200-144 BUSHING,BEARING |
10 | 901E Monthly PM O-ring kit, Tegal P/N |
11 | 93-220-001 REV.A |
12 | 98-176-001 / PCB SNS-1 SENSOR 15 90X / TEGAL |
13 | 99-002-004 / PCB MOTHERBOARD 415 / TEGAL |
14 | 99-003-002 / PCB PROCESS AUTOMATION / TEGAL |
15 | 99-004-001 / PCB AUTO END POINT DETECT / TEGAL |
16 | 99-013-001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL |
17 | 99-054-001 / PCB AUTOTUNE AT-1.5 415 / TEGAL |
18 | 99-089-001 / PCB E6S-1 SENSOR BLANK / TEGAL |
19 | 99-106-001 / PCB AUTOTUNE SLUG ATS-1 415 421 515 / TEGAL |
20 | 99-165-002 / PCB ESI-2 ELEVATOR SENSOR 900 / TEGAL |
21 | 99-187-001 / PCB AUTOTUNE ATO-1 90X / TEGAL |
22 | 99-187-002 / PCB AUTOTUNE 2 ATO-2 90X / TEGAL |
23 | 99-197-001 / PCB SSL-1 SLOTTED SENSOR 90X / TEGAL |
24 | 99-207-004 / PCB MICRO PROCESSOR / TEGAL |
25 | 99-287-003 / SHUTTLE INTERFACE BOARD SST-3 / TEGAL |
26 | Acromag AVME 921X Circuit Board Tegal 6550 Etcher |
27 | Acromag AVME 9320 1018-473B Circuit Board Tegal 6550 Etcher |
28 | Acromag AVME 932X Circuit Board Tegal 6550 Etcher |
29 | ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003 |
30 | AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 |
31 | AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 |
32 | Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A |
33 | Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal New Surplus |
34 | APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER |
35 | BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM 407098 |
36 | Carrier ring 4 inch, Tegal P/N |
37 | CAT 99-142-001 PCB ADIS-1 TEGAL 915 |
38 | CD1009-00301 / 903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL |
39 | CERAMIC STANDOFF 1/2 OD X 3/4 LG 6-32 (TEGAL) 80-170-013 |
40 | CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In |
41 | Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E |
42 | Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E |
43 | CR1113-00301EX / MATCHING NETWORK / TEGAL |
44 | CR1113-00801RW / TEGAL PLASMA, REWORK-MATCHING NETWORK / TEGAL |
45 | Curved indexer block, Tegal P/N 8100-1091 |
46 | DC POWER DISTRIBUTION |
47 | DC POWER SUPPLY |
48 | DIRECTIONAL POWER DETECTOR MODEL 3008 |
49 | ECM 0-1-115 Tegal 93-101-006 Rev E Cable RF p/n 39–804-001 1 , 41-147-001 |
50 | Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 |
51 | Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 Used |
52 | Endpoint cable, Fiber Optic, Tegal P/N 80-207-159 |
53 | EPROM Firmware Load/Unload, Tegal P/N 26-003-001 |
54 | FRONT PANEL INTERFACE BOARD |
55 | GAS INTERFACE BOARD |
56 | GCA 66635-14 Circulating System Tegal Precision Scientific |
57 | Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002 |
58 | Isel 10-27-0038 Atmospheric Elevator Tegal 80-055-717 w/Platform & Cables Spare |
59 | Isel Robotik 10-27-0038 7″ Atmospheric Elevator Robot Tegal 80-055-717 Working |
60 | Isel Robotik 10-27-0038 7″ Atmospheric Elevator Tegal 80-055-717 |
61 | Last one |
62 | Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518 |
63 | Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520 |
64 | Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001 |
65 | Manifold weldment, 4 line with ultratorr fitting, Tegal P/N |
66 | Manual for Tegal 801/803, operational and maintenance, schematic manual |
67 | manual for Tegal 804 |
68 | MATCHING NETWORK |
69 | MATCHING NETWORK INTERFACE |
70 | MEMORY AND BAUD EXPANSION PCB |
71 | MOTOR, Belt drive Barber Coleman, Tegal P/N |
72 | NEW Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007 |
73 | NEW Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2 |
74 | NEW Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002 |
75 | New Tegal TGL 99-013-001 Rev. G SET-1 Circuit Board TGL 99-013-001 |
76 | New Tegal TGL 99-106-001 PCB ATS Auto Tune Slug / 99-106-001 Rev.K |
77 | New Tegal TGL 99-106-001 PCB ATS Auto Tune Slug Printed Circuit Board |
78 | OEM Part TEGAL 39-34-005 Chamber body 903E |
79 | OEM Part TEGAL 39-341-005 CHAMBER BODY |
80 | OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901 |
81 | ORIENTAL MOTOR PH266L-33 STEPPER MOTOR 24V 0.3A 1.8/STEP, TEGAL 901E / 903E |
82 | PCB UCT FRONT PANEL INTERFACE |
83 | PCB, Process Control, Tegal P/N 99-019-02 |
84 | PCB, Sensor with cables, Tegal P/N 99-089-001 |
85 | PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001 |
86 | PCB, Tegal P/N 99-095-001 |
87 | Photocell, Tegal P/N 80-500-007 |
88 | PROFACTURE PCB TMC-4 Temperature Monitor Control PRO-99-138-004 |
89 | PROFACTURE TEGAL ICG-6 Gas Interface Board |
90 | Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 |
91 | QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E 5 PIN LOTS |
92 | RF Match Box for Tegal 803 |
93 | RFPP RF Plasma Products T-501 RF Generator Tegal CR1087-20101 |
94 | RFPP RF Plasma Products T-502S RF Generator Tegal CR1087-20101 |
95 | RING INSULATOR CERAMIC .20-99.5% |
96 | Risshi/Tegal YR-9030DHF(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger |
97 | Risshi/Tegal YR-9030DHI(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger |
98 | Sekidenko 2000 Optical Fiber Thermometer Tegal 950-2013-01 Tegal 6550 |
99 | Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003 |
100 | Semitool 26-096-004 949298-00 Spin Rinse Dryer 6500 OEM Controller Tegal 6550 |
101 | Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100 |
102 | Sensor, E4 Ring Present, Tegal P/N |
103 | Sensor, temperature, Tegal P/N |
104 | SET OF BELTS FOR SENDER RECEIVER TEGAL 901 903 |
105 | SET OF O-RING,ROD SAPPHIRE |
106 | Shaft, Tegal P/N 50-007-001 |
107 | SHUTTLE INTERFACE BOARD WORKING |
108 | SHUTTLE INTERFACE PCB SST 3 |
109 | SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01 |
110 | Spectron Engineering SE130WB Lab/Industrial Optical Assembly Unit |
111 | SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001 |
112 | Swagelok/NuPro SS-8BAK-1C-2228 6LV-BNBW4-C Bellows Valve Assembly |
113 | Switch, Tegal P/N 80-678-004 |
114 | Switch, Tegal P/N 80-678-014 |
115 | Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002 |
116 | TEGAL Plasma ETCHER SST TEMPERATURE PROBE, P/N 80095-057, NOS |
117 | Tegal , RF Match |
118 | Tegal / Bay Pneumatic 80-095-217 BES-530-8-8-24-OMT-R BES-530-8-PCB Pneumatic |
119 | Tegal 00755601 Temperature Display Board, PCB |
120 | Tegal 0100-00136 Pcb Circuit Board Rev C |
121 | TEGAL 03601-22-040 / 0360122040 |
122 | Tegal 045-048 Temperature Probe Assembly for 903e |
123 | Tegal 07-175-004 RF CART AC MODULE w/ 1 Pipe Protect High Voltage Cable |
124 | Tegal 1011-00301 Display Board Assembly |
125 | TEGAL 211 PLASMA-ASHER |
126 | Tegal 211 Plasmaline Etcher Asher Chamber |
127 | Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS |
128 | Tegal 30-251-001 RF Conn Assy |
129 | Tegal 31-086-006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module |
130 | Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module |
131 | TEGAL 33-337-001 INNER BELLOWS |
132 | Tegal 33-527-001 Bellow Chuck New Surplus |
133 | Tegal 37-231-602 Chuck Ring |
134 | Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules |
135 | Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System |
136 | Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e |
137 | Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9″ |
138 | Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum |
139 | Tegal 39-733-003 Lower Non-anodize Electrode |
140 | Tegal 39-735-003 Lower Electrode, 5″ |
141 | Tegal 39-735-003 Lower Non-anodize Electrode |
142 | Tegal 40-046-001 Quartz Window Rev. D |
143 | Tegal 40-140-003D, Ring, Insultator, Ceramic |
144 | TEGAL 40-275-001 UPPER INSULATOR |
145 | Tegal 40-606-004 Ceramic Liner HRE2 |
146 | TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND |
147 | Tegal 41-238-008 RF Shield React Fill |
148 | Tegal 41-399-001 Gasket, RF-90Xe |
149 | TEGAL 415 PLASMA ASHER |
150 | TEGAL 42-401-001 Bracket Slide Rear LH T915 |
151 | Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS |
152 | Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is |
153 | Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003 |
154 | TEGAL 50590 01 |
155 | TEGAL 50590 01 PCB |
156 | Tegal 50590-01 PCB Plasma Etching |
157 | Tegal 50590-01 Wafer Etcher Main Controller 80-095 CD1043 Daughter Board PCB |
158 | TEGAL 515 PLASMA ASHER (With ) |
159 | Tegal 53-024-003 Sensor Assembly |
160 | Tegal 53-025-001 Retina Lamp |
161 | TEGAL 58-027-001 |
162 | Tegal 59-011-001, Linkage Top PL Latch |
163 | Tegal 6550 CC1326-00600 Chamber Stripper CR1324-00400 MTCH NTWK Source Strip |
164 | Tegal 701 Inline Automatic Wafer RF Plasma Etcher |
165 | Tegal 701 Plasma Inline Wafer RF Etcher Made in USA |
166 | TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH |
167 | TEGAL 701-SP MN RF Match Plasma in-line etcher |
168 | Tegal 80-095-1026 PCB MATCH CONTROLLER IP1.5 |
169 | Tegal 80-095-270 50555-01 ISS-8 Wafer Etcher CD1043 Main Controller Module Board |
170 | TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026 |
171 | TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915 |
172 | Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole |
173 | Tegal 80-202-186, Timing Belt |
174 | TEGAL 80-202-291 |
175 | TEGAL 80-202-361 Bearing |
176 | Tegal 803 Inline Automatic Wafer RF Plasma Etcher |
177 | Tegal 803 Inline Automatic Wafer RF Plasma Etcher |
178 | Tegal 803 Inline Wafer Automatic RF Plasma Etcher |
179 | Tegal 80-500-002 Photocell 250V 55K |
180 | Tegal 80-640-018 Profacture For Tegal 901e 903e 12v 0.8w Bay Base |
181 | Tegal 80-678-029 Flow Switch, AUTOFLOW FS574-587 |
182 | Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series |
183 | Tegal 81-105-223 Heater 120V 60Hz |
184 | TEGAL 83-099-001 Lift Pin |
185 | Tegal 83-126-003 Rev.C Industrial/Laboratory Controller Aux Board Assy |
186 | Tegal 900 series upper Chamber, complete |
187 | Tegal 901e Plasma Etcher |
188 | Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply |
189 | Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E |
190 | TEGAL 903e ALUMINUM UPPER ELECTRODE, NEW PN: 39-680-003 Rev F |
191 | TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS PN: 39-680-003 Rev D |
192 | Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver |
193 | TEGAL 903e PLASMA ETCHER EIA-3 ELEVATOR PCB P/N 99-246-003 |
194 | Tegal 903E PLASMA ETCHER PCB, 50590-01 |
195 | Tegal 93-137-009, RF Cable |
196 | Tegal 94-400-001, Harness Sensor |
197 | Tegal 94-484-001 Cable Assy |
198 | Tegal 965 / 915 Plasma Asher / Removed Operational from facility /Complete/Clean |
199 | TEGAL 98-129-003 PCB CIRCUIT BOARD REV A NIB |
200 | Tegal 98-176-001 B 99-176-001 K Wafer Plasma Etcher Sensor SNS Board Assembly |
201 | Tegal 98-176-001 Pcb Circuit Board Rev D |
202 | Tegal 98-223-002 Pcb Circuit Board Rev B |
203 | TEGAL 98-249-001 PCB CIRCUIT BROAD REV 2 |
204 | TEGAL 98-249-002 PCB CIRCUIT BOARD, REV C |
205 | TEGAL 98-287-002 PCB CIRCUIT BOARD REV A |
206 | Tegal 98-354-002 CPU Transition Board VME PCB Card |
207 | Tegal 98-363-00 VME Backplane Board PCB CTC-ML |
208 | Tegal 98-398-002 Pcb Circuit Board Rev A |
209 | Tegal 98-429-001 PCB |
210 | Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB |
211 | TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy, used PCB board |
212 | TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy |
213 | TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy |
214 | Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher |
215 | Tegal 99-096-09 DIP Board PCB Rev. G |
216 | Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001 |
217 | TEGAL 99-112-001 Top display control, TDC-1 PCB board assy |
218 | Tegal 99-126-005 903e IGC-5 PCB Module / Card for Plasma Etcher Semiconductor |
219 | Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N |
220 | Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E |
221 | Tegal 99-126-005 PCB Gas Interface |
222 | TEGAL 99-126-005 REV H.IGC-5 PCB GAS INTERFACE CONTROLLER BOARD |
223 | TEGAL 99-126-005 REV P.IGC-5 98-126-005 PLASMA DS-5-4-002 CONTROLLER |
224 | Tegal 99-126-006 Interface Board PCB ICG-6 |
225 | Tegal 99-126-006 PCB IGC-6 Gas Interface |
226 | Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005 |
227 | Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006 |
228 | Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006 |
229 | Tegal 99-129-003 Pcb Circuit Board Rev B |
230 | TEGAL 99-129-006 PCB CIRCUIT BOARD REV A NNB |
231 | Tegal 99-138-001 PCB Assembly, FAB 98-138-001 |
232 | TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E, TMC-4 |
233 | TEGAL 99-138-004 TEMPERATURE MONITOR CONTROL CONTROL BOARD, REV. E TMC-4 |
234 | Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly |
235 | Tegal 99-160-006 Rev.E Industrial/Laboratory RFI-6 Controller Board Assembly |
236 | TEGAL 99-165-003 B ESI Plasma Etcher Etching |
237 | TEGAL 99-165-003 REV A ESI-3 Plasma Etcher Etching |
238 | Tegal 99-169-005 PHC-5 Wafer Etcher Detector Light Sensor Photocell Board PCB |
239 | Tegal 99-172-003 PCB |
240 | Tegal 99-173-003 RFG-3 PCB – Lot of 2 |
241 | TEGAL 99-173-004 GENERATOR BOARD. REV D |
242 | Tegal 99-173-004 Pcb Circuit Board Rev E |
243 | Tegal 99-173-004 PCB, RFG-4, RF Gen Interface |
244 | Tegal 99-173-005 PCB RFG-5 |
245 | tegal 99-173-007 RF Interface PCB |
246 | Tegal 99-173-008 PCB, RFG-8, RF Gen Interface |
247 | Tegal 99-174-007 Rev.1 BPL-7 Industrial PCB Printed Circuit Board Card Unit |
248 | Tegal 99-174-008 REV A BPL-8 Wafer Module Driver Controller I/O Interface Board |
249 | Tegal 99-174-008 REV. A BPL-8 Wafer Etcher Interface Main I/O Backplane Board |
250 | Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit |
251 | Tegal 99-184-004 MIC-4 Main Controller Module CD1043 Interface Connector Board |
252 | Tegal 99-185-002 MMI-2 Wafer Etcher CD1043 Main Controller Rear Interface Board |
253 | Tegal 99-186-001 Rev. 2A Interface Board PCB Att-1 |
254 | Tegal 99-187-002 ATO-2 Board |
255 | Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B |
256 | Tegal 99-196-002 ATI-2 PCB Rev. W |
257 | Tegal 99-196-002 PCB ATI-2 for Tegal 901e |
258 | Tegal 99-196-003 ATI-3 Microprocessor Controller Module RF Processor Board Assy |
259 | Tegal 99-196-003 Rev.A Industrial ATI-3 Auto-Tune Board Assembly Unit |
260 | Tegal 99-200-005 M300353 903e Sensor Interface Spatula SIS-5 REV G |
261 | Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002 |
262 | Tegal 99-200-005 Sensor Interface PCB SIS-5 |
263 | TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE |
264 | Tegal 99-201-001 IIQ-1 REV D Wafer Chamber Etcher System Driver Interface Board |
265 | TEGAL 99-203-004 PCB MNP-4 MTCH NTWK |
266 | Tegal 99-203-004 Rev G MNP-4 Control Board |
267 | Tegal 99-204-001 Rev. E OMD-1 Wafer Elevator Handling Selector Driver PCB Board |
268 | Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW |
269 | Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board |
270 | Tegal 99-207-004 PCB |
271 | Tegal 99-207-004/K MBE-4 PCB |
272 | Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly |
273 | Tegal 99-209-003 Pcb Circuit Board Rev D |
274 | TEGAL 99-214-003 / G AME-3 |
275 | TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3 |
276 | Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board |
277 | Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board |
278 | Tegal 99-223-002 Pcb Circuit Board Rev G |
279 | Tegal 99-223-002 PCB, DSN-2, Dual Sensor |
280 | Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001 |
281 | Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB |
282 | Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module |
283 | Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module |
284 | Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module |
285 | Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module |
286 | Tegal 99-232-004RW PCB |
287 | Tegal 99-235-004 Rev E MCM-4 Control Board |
288 | Tegal 99-237-002 Interface Board PCB EEP-2 |
289 | Tegal 99-240-002 PCB |
290 | Tegal 99-240-003 PCB |
291 | Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB |
292 | Tegal 99-247-002 PCB |
293 | Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher |
294 | Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy |
295 | Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS |
296 | Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board |
297 | Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
298 | Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
299 | Tegal 99-287-001D REV C SST PCB |
300 | Tegal 99-287-003 PCB SST-3 Shuttle Interface |
301 | Tegal 99-287-003 SST-3 Board |
302 | Tegal 99-287-003RW Board |
303 | Tegal 99-287-003RW Platine |
304 | Tegal 99-287-003RW Platine |
305 | Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
306 | Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
307 | Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
308 | Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
309 | Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly |
310 | Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly |
311 | Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly |
312 | Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly |
313 | Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly |
314 | Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy |
315 | Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 Used |
316 | Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency |
317 | Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency |
318 | Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 |
319 | Tegal 99-80267-01 PCB Shuttle Interface |
320 | Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS |
321 | Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS |
322 | Tegal 9XX PCB, 99-165-003 REV.J, NOS |
323 | Tegal 9XX PCB, 99-207-003 REV.2 MBE-3 |
324 | Tegal 9XX PCB, 99-207-004 REV.C MBE-4 |
325 | Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS |
326 | Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003 |
327 | Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B |
328 | Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001 |
329 | TEGAL AC MODULE 1028-00302 |
330 | Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
331 | Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit |
332 | Tegal CC1326-00100 Chamber-Stripper For Parts As-Is |
333 | Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe |
334 | Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit |
335 | Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In |
336 | Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In |
337 | Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module |
338 | Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module |
339 | Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame |
340 | Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module |
341 | TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS |
342 | Tegal CD1310-00104 Endpoint Module |
343 | Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher |
344 | Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher |
345 | Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH |
346 | Tegal CE00840 WDE 103 ZA053-600 |
347 | Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1 |
348 | Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1 |
349 | Tegal CE00843 2 CTS MALE PLUG S 104 A051-130 |
350 | Tegal CE00844 4 CTS MALE PLUG S 103 A053-130 |
351 | Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1 |
352 | Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I |
353 | Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module |
354 | Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly |
355 | Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module |
356 | Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly |
357 | Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit |
358 | Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit |
359 | Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame |
360 | Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU |
361 | Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit |
362 | Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit |
363 | Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit |
364 | Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly |
365 | Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In |
366 | Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit |
367 | Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly |
368 | Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit |
369 | Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS |
370 | Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module |
371 | Tegal CE1323-10101 AC Module Distribution |
372 | Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 Working Spare |
373 | Tegal CE1354-00200 DC Power Supply Module |
374 | Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly |
375 | Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly |
376 | Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit |
377 | Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit |
378 | Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module |
379 | Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH |
380 | Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER |
381 | Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2) |
382 | Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK |
383 | Tegal Compact Air Products Water Chuck, Vacuum Pump |
384 | Tegal Control Unit |
385 | Tegal Corp 39-452-002A ARM UPPER LH DOOR T915 |
386 | TEGAL CORP 39-453-001 |
387 | TEGAL CORP 39-453-002 |
388 | Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915 |
389 | Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915 |
390 | TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″ |
391 | TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER |
392 | Tegal Corp 42-401-002 O-Ring, 235 V |
393 | Tegal Corp 42-402-001 Bracket Slide Front LH T915 |
394 | Tegal Corp 42-402-002 Bracket Slide Front RH T915 |
395 | Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915 |
396 | Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420 |
397 | Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER |
398 | Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915 |
399 | Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915 |
400 | Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS |
401 | Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit |
402 | Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit |
403 | Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly |
404 | Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit |
405 | Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS |
406 | Tegal CR1087-20101RW RWK-RF Generator CR1087-20101RW – RF Plasma Model# T-502S |
407 | Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher |
408 | Tegal CR1324-00100 RF Match Network Source Strip |
409 | Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe |
410 | Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE |
411 | Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher |
412 | Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 |
413 | Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 |
414 | Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher |
415 | Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool |
416 | Tegal CV00110 O-RING 699 |
417 | Tegal CV00133 O-RING 178 01250 |
418 | Tegal CV00134 O-RING 200 21313 G2 T47501 FPM |
419 | Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE |
420 | Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE |
421 | Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE |
422 | Tegal CV00476 O-RING 0.138 X 0.609 |
423 | Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ |
424 | Tegal CV00481 O-RING 0.210 X 1.1 |
425 | Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 |
426 | Tegal CV00507 O-RING 533 |
427 | Tegal CV00508 O-RING 270 |
428 | Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH |
429 | Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH |
430 | Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING |
431 | Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit |
432 | Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000 |
433 | Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor |
434 | Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor |
435 | Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly |
436 | Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly |
437 | Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor |
438 | Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly |
439 | Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module |
440 | Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit |
441 | Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly |
442 | Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly |
443 | Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module |
444 | Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board |
445 | Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher |
446 | Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher |
447 | TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201 |
448 | Tegal elevator frame assembly |
449 | TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202 |
450 | TEGAL EPROM 400k MEMORY PCB, PN 99-095-320 |
451 | Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display |
452 | TEGAL Front Robot Loader interface |
453 | Tegal Heater Controller Tegal 6550 Etcher *working |
454 | Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack |
455 | Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit |
456 | Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS |
457 | Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module |
458 | Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter |
459 | Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter |
460 | Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100 |
461 | Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB |
462 | Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS |
463 | Tegal Model 421 Manual PCB 99-011-001 |
464 | Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot |
465 | Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, |
466 | Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS |
467 | Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS |
468 | Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M |
469 | Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH |
470 | Tegal MyDax 2H14A Temperature Controller Instruction Manual |
471 | Tegal P/N 31-165-006 Stepping Motor, Carrier |
472 | TEGAL PCB ASSY (PARTS) 98-391-004 |
473 | TEGAL PCB ASSY 31-398-002 |
474 | TEGAL PCB ASSY 98-391-004 |
475 | TEGAL PCB ASSY 99-406-001 |
476 | TEGAL PCB ASSY 99-416-001 |
477 | Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply |
478 | Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A |
479 | TEGAL PLASMA 903 |
480 | TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B |
481 | TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F |
482 | Tegal PlasmaLine 200 Plasma Barrel Etcher – Power Supply |
483 | Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve |
484 | TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS |
485 | TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER |
486 | Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher |
487 | Tegal Quartz PIN P/N 40-297-001-E, NEW |
488 | Tegal RF Delivery |
489 | Tegal RF Interface PCB # 99-173-008 |
490 | TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E |
491 | Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit |
492 | Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit |
493 | Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400 |
494 | Tegal SPI-80-095-057 Probe Temperature SST |
495 | Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module |
496 | Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply |
497 | Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2 |
498 | Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART |
499 | Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883 |
500 | Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2) |
501 | Tegal Type 41-137-001 Flag Chuck For Tegal Etcher |
502 | Tegal Type 80-202-186 Timing Belt (Pack Of 4) |
503 | Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 |
504 | Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler |
505 | Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea. |
506 | Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS |
507 | TEGAL XJET-11503 TCU Elbow Fitting, 416192 |
508 | Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly |
509 | Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
510 | Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit |
511 | TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B |
512 | TEGAL1513e MOTOR CONTROLLER ITEM CE 1093 |
513 | Thermo Couple (TC) TEGAL 80-700-xx JES-CE |
514 | Unit/Tegal CHF3 80SCCM — UFC-1000 |
515 | Vacuum valve, KF-40. Tegal P/N |
516 | VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe |
517 | Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge |
518 | Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher |
Tegal Spare Parts in stock for Tegal 901e , Tegal 903e , Tegal 901 , Tegal 903 , Tegal 981e , Tegal 983e , Tegal 700 , Tegal 701 , Tegal 703 , Tegal 801 , Tegal 803 , Tegal 421 , Tegal 415 , Tegal 965 , Tegal 915 ,Tegal 1500e , Tegal 1501e , Tegal 1503e , Tegal 1600 , Tegal 1601e , Tegal 1611 , Tegal 1612 , Tegal 1603e , Tegal 6000 , Tegal 6500 , Tegal 6510 .
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