Description
Model: STS M/PLEX CVD, 6INCH
Category: CVD
Original Equipment Manufacturer: Surface Tech Sys ( STS , SPTS )
Condition: Used
Wafer Size: 6 inch now
Vintage: 2005
Valid Time: Subject to prior sale
Location: Asia
Warranty: No warranty
Pressure Controller | MKS 600, MKS 653B |
Gas Module Chamber | 1. N2 2. O2 3. N2O 4. CF4 5. SIH4 6. NH3 |
RF Generator | ENI ACG-3B 13.56, AE LF-5, 50~460MHz |
CHILLER | AFFINITY RWA-012L-CE35CB4 STS |
PUMP | VARIAN SH100 |
SS380EB