Description
Refurbished STS / SPTS Multiplex ICP DRIE Plasma Etch Systems
SemiStar Corp. offers refurbished STS / SPTS Multiplex plasma etch systems based on current inventory, including Bosch process DRIE, HRM deep silicon etch, ICP RIE, and M/PLEX metal etch systems. STS, later known as SPTS Technologies and now associated with KLA through the SPTS product line, is well known in MEMS, semiconductor R&D, compound semiconductor, TSV, deep silicon etch, and university cleanroom applications.
Available systems vary by original configuration, wafer size, chamber type, RF configuration, gas box, pumping package, and application history. SemiStar lists STS systems based on actual inventory and customer application matching rather than a standardized platform package.
Refurbished systems are supplied based on current inventory and original equipment configuration. Installation, startup assistance, and warranty may be available depending on system condition, final configuration, and project scope.
Photo shown is for reference only. Actual system appearance and configuration may vary.
Current STS / SPTS Inventory
| System Type | Qty | Typical Applications |
|---|---|---|
| STS Bosch Process DRIE | 2 | MEMS, deep silicon etch, through-wafer etch, TSV, SOI silicon etch |
| STS Multiplex HRM | 1 | High-rate deep silicon etch, MEMS production, high aspect ratio silicon structures |
| STS M/PLEX Metal Etch | 1 | Metal etch, III-V materials, GaAs, InP, compound semiconductor applications |
| STS ICP RIE | 2 | General ICP plasma etch, SiO2, SiNx, polysilicon, semiconductor R&D |
STS / SPTS Multiplex System Applications
STS Multiplex and SPTS plasma etch systems have been widely used for MEMS fabrication, Bosch deep reactive ion etching, ICP RIE plasma etch, TSV development, silicon micromachining, dielectric etch, metal etch, and compound semiconductor research. Depending on configuration, available systems may support fluorine-based silicon etch, oxide or nitride etch, chlorine-based metal etch, or other application-specific plasma processes.
Inventory-Based Configuration
Each STS / SPTS system may be configured differently. Please contact SemiStar with your process requirements, wafer size, material, target etch application, gases, and facility limitations so we can review which available system may be suitable.
Important Notes
- Refurbished equipment availability is subject to prior sale.
- Refurbished systems are supplied based on current inventory and original equipment configuration.
- Actual configuration must be confirmed by quotation.
- SemiStar does not provide spare parts or service support for STS systems not sold by SemiStar.
- All OEM names, trademarks, and model names belong to their respective owners.
- All website information is for reference only and is not a purchase specification. Final configuration, scope, price, and terms are based on SemiStar’s official quotation.
Request STS / SPTS Equipment Availability
Please contact SemiStar with your target application and required configuration. Helpful information includes wafer size, substrate material, process gases, target etch depth, etch material, cleanroom facility limitations, and expected purchase timeline.
Contact SemiStar
SS5732PHOTO-SS380 Stock