Refurbished Gasonics Aura 2000LL Microwave Downstream Plasma Asher Semiconductor Equipment

SemiStar Corp. offers refurbished Gasonics Aura 2000LL microwave downstream plasma asher semiconductor equipment refurbished to OEM specification for qualified end-user customers. The Gasonics Aura 2000LL is a production-proven single wafer load lock downstream plasma photoresist ashing system widely used for semiconductor wafer fabrication, descum, resist stripping, and related semiconductor process applications.

This microwave downstream plasma asher supports low-damage photoresist removal with load lock wafer handling capability for compound semiconductor, MEMS, university, research institute, and advanced semiconductor manufacturing applications.

Photo is for reference only. Actual system configuration and appearance may vary.

System Description

The Gasonics Aura 2000LL is a single wafer microwave downstream plasma asher semiconductor equipment designed to address the demands for ultra-clean and low-damage photoresist removal applications.

The system utilizes a load lock architecture with downstream microwave plasma technology to minimize wafer contamination and process damage while supporting automated semiconductor wafer handling capability.

The Aura 2000LL platform is suitable for semiconductor fabs, compound semiconductor applications, MEMS processing, universities, research institutes, and pilot production environments requiring reliable downstream plasma ashing performance.

Configuration Capability

• Single wafer load lock processing configuration
• 5 inch, 6 inch, and 8 inch wafer capability
• Microwave downstream plasma ashing configuration
• Low-damage downstream plasma process capability
• Automatic wafer loading and unloading capability
• Four process gas MFC configuration capability
• Load lock with cool-down station
• Water-cooled chamber and lamp assembly
• Regulated platen heat source for process temperature control
• Downstream endpoint detection capability
• Flush-mount or through-the-wall installation capability
• Ceramic plasma tube chamber configuration
• Front-side and optional back-side processing capability
• Programmable microprocessor control capability

Applications

• Photoresist stripping
• Microwave downstream plasma ashing
• Bulk photoresist removal
• Descum process
• Low-damage plasma cleaning
• Semiconductor wafer cleaning
• Non-oxidizing metal processing
• Compound semiconductor processing
• MEMS process applications
• University and research institute applications
• Pilot production and semiconductor fab applications

Typical Process Capability

Typical Gasonics Aura 2000LL process capability may include downstream microwave plasma ashing, endpoint monitoring, platen heating, load lock wafer transfer, and controlled process gas flow.

• Wafer Capability: 5 inch to 8 inch
• Throughput: Typically 20–40 WPH depending on process parameters
• Microwave Plasma Processing: Downstream low-damage plasma capability
• Process Gases: NF₃, CF₄, O₂, N₂, and other gases depending on configuration
• Automatic Handling: Cassette-to-cassette wafer transfer capability

Actual performance depends on the final system configuration, wafer type, process recipe, resist condition, and customer facility conditions.

Facility Requirements

Facility requirements should be confirmed before PO and may vary depending on the exact system configuration. Typical facility items may include:

• Power: 208 VAC, 3 phase, 60 Hz, approximately 30 A
• Vacuum: Pumping capability required
• Exhaust: Cabinet exhaust required
• Process Gases: NF₃, CF₄, O₂, N₂, and other gases depending on process configuration
• Utilities: Final utility requirements to be confirmed with SemiStar before shipment
• Facility Responsibility: Customer is responsible for facility preparation, vacuum pumps, chillers (if applicable), process gas supply, exhaust, CDA, power connection, and related facility support items unless otherwise specified in quotation.

PC Controller Upgrade Service

In addition to offering refurbished Gasonics Aura 2000LL systems, SemiStar also provides PC controller upgrade solutions for customer-owned working systems. We can upgrade legacy Gasonics Aura platforms with modern PC-based control systems, graphical user interfaces, updated electronics, and replacement of obsolete components to improve reliability, usability, and long-term support capability.

RFQ Information Required

To help us recommend the correct configuration and provide an accurate quotation, please provide the following information:

• End user company name and contact information
• Wafer size
• Wafer material
• Photoresist type and thickness, if available
• Required process gases
• Process specifications and target results
• Throughput requirement
• Temperature requirement
• Endpoint detection requirement
• Have you used Gasonics Aura 2000LL or similar downstream plasma asher equipment before? If yes, please provide model information.
• Budget range
• Purchase timeline
• Any special facility or installation requirements

Contact SemiStar

SS380-MSP-350