Description
New Wet Process Equipment – Spin Rinse Dryers, Box Washers, Mask Cleaners, Waste Carboys, Bottle Washers, Wet Benches, Chemical Delivery Systems
New + Refurbished + Customized Wet Process Equipment Solutions
Quick Navigation : Spin Rinse Dryers (SRD) | Wet Benches | Box Washers | Mask Cleaners | Chemical Systems
SemiStar provides new wet processing equipment solutions for semiconductor fabs, universities, and R&D facilities. Our systems support wafer cleaning, drying, chemical processing, and contamination control across a wide range of applications.
We combine new equipment platforms, refurbished legacy systems, and customized configurations to deliver flexible, cost-effective, and production-proven solutions tailored to your process requirements.
Key Equipment Offerings
Spin Rinse Dryers (SRD)
High-performance systems designed for wafer cleaning and drying processes.
- Single and dual stack configurations
- Compatible with multiple wafer sizes (2”–8” and beyond)
- Stable and repeatable drying performance
- Ideal for post-etch, post-clean, and surface preparation
Wet Benches
Flexible wet processing systems for batch chemical treatment in cleanroom environments.
- Acid and solvent process capability
- Manual and semi-automated configurations
- Custom deck layouts and tank designs
- Easy integration with existing fab infrastructure
Chemical Handling & Delivery Systems
Designed for safe, reliable, and efficient wet processing operations.
- Centralized or tool-level chemical delivery
- Compatible with acids, solvents, and DI water
- Integrated safety and monitoring features
- Seamless connection to wet benches and standalone tools
Box Washers / Cassette Cleaners
Automated systems for cleaning wafer carriers, cassettes, and process hardware.
- Supports a wide range of cassette and box types
- High-throughput cleaning capability
- Custom racks for different substrates
- Spare parts and upgrade support available
Mask Cleaners
Precision cleaning systems for photomasks and reticles.
- Configurable cleaning processes
- Compatible with masks, wafers, and film frames
- High repeatability and contamination control
- Suitable for both R&D and production environments
Upgrade & Modernization Options
SemiStar offers upgrade solutions to enhance performance, reliability, and usability:
- PLC and touchscreen HMI upgrades
- Improved recipe management and process control
- SECS/GEM compatibility for fab integration
- Advanced diagnostics and troubleshooting
Refurbished + New Hybrid Solutions
In addition to new equipment, we provide:
- Refurbished legacy systems (e.g., SRD, wet benches, cleaners)
- Re-engineered and upgraded platforms
- Spare parts and field service support
This approach allows customers to achieve the optimal balance of cost, performance, and lead time.
Applications
- Wafer cleaning and drying
- Post-etch and post-deposition cleaning
- Surface preparation
- Chemical processing
- Photomask and reticle maintenance
- Cassette and carrier cleaning
Why Work with SemiStar
- Multi-source equipment solutions (new + refurbished)
- Strong experience in compound semiconductor and research fabs
- Flexible configurations tailored to your process
- Fast RFQ response and engineering support
Request a Quote
Please provide the following information and our team will recommend a suitable configuration:
- Wafer size and material
- Process type (cleaning, chemical, etc.)
- Throughput requirement
- Facility constraints (cleanroom, utilities)
- Budget and purchase timeline
Quick Navigation : Spin Rinse Dryers (SRD) | Wet Benches | Box Washers | Mask Cleaners | Chemical Systems
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