LAM RESEARCH Spare Parts

Description

Please contact us for the availability of the following used semiconductor equipment and parts. The items are subject to prior sale without notice. These items are only for end users.

1. LAM RESEARCH,716-011758-016 / 716-028028-006 / 716-011923-001 / 716-011563-161 4pc Consumable Kit for LAM Etcher 4500/4500i Ceramic,Kit Includes: (1) 716-011758-016 – Focus Orifice Combo Ring, (1) 716-028028-006 – Electrode Ring, (1) 716-011923-001 – Clamp Attachment Ring, (1) 716-011563-161 – Wafer Domed Clamp,
2. LAM RESEARCH,716-011057-002 / 716-011036-001 / 716-011540-001 3pc Consumable Kit for LAM Rainbow 4400 Ceramic,  Kit Includes: (1) 716-011057-002 – Ring Filler Upper Alumina, (1) 716-011036-001 – Orifice Ring
   (1) 716-011540-001 – Upper Face Ring
3. LAM RESEARCH,716-031453-002 / 716-330122-003 / 716-330122-002 3pc Consumable Kit for LAM Etcher 9600 Ceramic, Kit Includes: (1) 716-031453-002 – TCP Filler Ring, (1) 716-330122-003 – pl, top, cer, fxd, gap w/shld, (1) 716-330122-002 – Gas Distribution Plate
4. LAM RESEARCH,716-028028-006 Electrode Ring Ceramic
5. LAM RESEARCH,716-011923-001 Clamp Attachment Ring Ceramic
6. LAM RESEARCH,716-011563-161 Wafer Domed Clamp Ceramic
7. LAM RESEARCH,716-028123-002 Ring Filler Ceramic
8. LAM RESEARCH,716-031453-002 TCP Filler Ring Ceramic
9. LAM RESEARCH,716-011036-001 Orifice Ring 4400 Ceramic
10. LAM RESEARCH,716-011540-001 Upper Face Ring Ceramic
11. LAM RESEARCH,716-330122-002 Gas Distribution Plate Ceramic