Description
Kurt Lesker PVD75 ebeam and thermal deposition system
- Barely used Kurt Lesker PVD75
- KLE06 e-beam source with 4 pockets x 8cc, 5KW power supply
- 2X thermal source
- Standard thermal power supply up to 12V or 400A, max 2kW applied power
- rotating platten for max 8″ wafer
- deposition shields
- Quartz lamp substrate heaters (2)
- Flip shutter
- quartz crystal thickness monitor (3)
- CTI 8F Cryo pump/compressor with 25′ lines
- Edwards XDS10 roughing scroll pump
- 208v, 3 phase 50/60
Please contact us if you are interested in the item. This item is only for end users and are subject to sale without notice. Appreciate your time.
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