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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
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Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
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TES
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SemiStar Corp. Semiconductor Equipment Parts Service

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STS SPTS PN 256326 4″ Echuck

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STS SPTS PN 256328 6″ Echuck

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AG Repair Refurbish

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Vacuum Pump Compressor

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Customized Quartz, Ceramic Silicon

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Novellus GaSonics Waveguide

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Quartz Trays

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Sintered SiC (SSiC) Susceptor Tray

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Tegal WAFER Transfer

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Matrix Monitor 995-10532

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Brooks 6100-87 1085-0007

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Touch Screen Monitor

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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STS SPTS PN 256326 4″ Echuck

STS SPTS PN 256328 6″ Echuck

AG Repair Refurbish

Vacuum Pump Compressor

Customized Quartz, Ceramic Silicon

Novellus GaSonics Waveguide

Quartz Trays

Sintered SiC (SSiC) Susceptor Tray

Tegal WAFER Transfer

Matrix Monitor 995-10532

Brooks 6100-87 1085-0007

Touch Screen Monitor