Description
OXFORD Plasma lab system 100 PECVD, Plasmalab 100 PECVD (PDF with description and photos)
Condition: Refurbished
GAS BOX CONFIG
- GAS 1 MKS 1479A 5%SiH4/N2 1000SCCM
- GAS 2 MKS 1479A NH3 100SCCM
- GAS 3 MKS 1179A N2 2000SCCM
- GAS 4 MKS 1179A N2O 3000SCCM
- GAS 5 MKS 1179A O2 300SCCM
- GAS 6 MKS 1179A Ar 500SCCM（TEOS carrier gas）
- TEOS THERMOTANK:THERMOCENTER salvis LAB
CHAMBER CONFIGURATION
- Chuck φ202mm（ φ2’φ4’φ6’φ8’）
- Shower head φ225mm
RF SYSTEM
- RF Generator：AE RFX600A
- MATCH BOX:OPT AMU OXFORD
- LF Generator：AE LF-5
- MATCH BOX: MANUAL TRANSFOR UP
PRESSURE CONTROL
- VALVE:VAT 12036-PA44
- MKS VALVE CONTROL:253B
TURBO PUMP
- ALCITEL ACT200T CONTROL UNIT
- ALCITEL ATP 80/100 TURBO PUMP
LL CHAMBER
- φ2’φ4’φ6’φ8’single wafer auto transfer
- SLIT VALVE:VAT 02110-BA24-AQZ1
- PIRANI GAUGE:EDWARDS APG-L-NW16
- VACCUM GAUGE :EDWARDS AIM-S-NW25
DRY PUMP
- EDWARDS:QDP40
SYSTEM CONTROL
- HP PC system，Windows XP
POWER
- POWER:208VAC 3PHASE
- FULL LOAD:25AMPS
Location: Jiangsu, China
Lead time: 4 TO 12 WEEKS DEPENDING ON PURCHASE TIME.
Valid Time: Subject to prior sale. This item is only for end user
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.
SS9892-2-MSP-175