Description

Cascade Microtech PS-21 Probe Station / Auto Prober Semiconductor Equipment

SemiStar Corp. offers Cascade Microtech PS-21 Probe Station systems for semiconductor wafer probing, device characterization, parametric testing, MEMS applications, compound semiconductor applications, university laboratories, and production-support environments.

Available systems include Cascade Parametric Series PS21 / Microtech Auto Prober configurations with wafer handling robot and prealigner systems for automatic wafer probing operation.

We currently have 3 sets available. Systems are available in:

• AS-IS condition
• Refurbished condition

Photos shown are for reference only. Actual system configuration, accessories, robot, prealigner, microscope, chuck type, probe card interface, software, and installed options may vary.

Available Inventory

• Quantity available: 3 sets
• Model: Cascade Microtech PS-21 Probe Station
• Parametric Series PS21 / Microtech Auto Prober configuration
• Wafer size capability: Up to 8 inch / 200 mm
• AS-IS or refurbished condition available
• Installation and startup support available if applicable
• Subject to prior sale

Basic Configuration

• Cascade Microtech PS-21 Probe Station
• CASCADE PARAMETRIC SERIES PS21 Auto Prober platform
• Equipe Tech ATM105 Robot or equivalent
• Robot Model: ATM105-1-S
• Equipe PRE-4394 or equivalent Prealigner
• Equipe Robot Controller
• Automatic wafer handling configuration
• Probe station microscope assembly
• Parametric wafer probing platform

System Description

The Cascade Microtech PS-21 Probe Station is designed for semiconductor wafer probing and parametric testing applications requiring accurate probe positioning, automated wafer handling, and reliable wafer-level electrical characterization.

The system configuration includes an automatic wafer handling robot and prealigner to support higher throughput wafer probing applications for semiconductor research and production-support environments.

The PS-21 platform is suitable for engineering, R&D, failure analysis, process characterization, and semiconductor device testing applications.

Typical Applications

• Semiconductor wafer probing
• Parametric device testing
• Wafer-level electrical characterization
• MEMS wafer probing
• Compound semiconductor wafer probing
• University and institute semiconductor research
• Failure analysis support
• Process development applications
• Engineering wafer evaluation
• Production-support wafer test

Wafer Capability

• Up to 8 inch / 200 mm wafers
• Additional wafer size configurations may be possible depending on installed hardware
• Final wafer capability subject to actual installed chuck and wafer handling configuration

Typical Features

• Automatic wafer handling capability
• Robot wafer transfer system
• Wafer prealignment capability
• Microscope probe alignment
• Probe station parametric testing platform
• High-precision wafer positioning
• Engineering and production support capability
• Manual and automated wafer probing operation depending on configuration

Available Sales Conditions

AS-IS Condition

• System sold in current condition
• Limited inspection only
• No refurbishment included
• No performance guarantee unless specifically stated in quotation

Refurbished Condition

• System cleaning and inspection
• Mechanical and electrical inspection
• Robot and prealigner verification if applicable
• Motion system inspection
• Probe station operational verification
• Functional test before shipment based on agreed quotation scope
• Warranty available under formal quotation terms
• Installation and startup support available if applicable

RFQ Information Requested

To recommend the correct Cascade PS-21 configuration, please provide:

• Wafer size
• Wafer material
• Probe card information
• Required automation level
• Required chuck configuration
• Microscope or vision requirements
• Application type
• Tester interface requirements
• Installation location
• Expected purchase timeline

Facility Requirements

• Customer is responsible for facility preparation
• Electrical requirements depend on final configuration
• Compressed air or vacuum may be required
• Tester interface compatibility should be confirmed before purchase
• Rigging and utilities are customer responsibility unless otherwise specified

Important Notes

• Configurations may vary between available systems.
• Installed options and accessories should be confirmed before purchase.
• Final specifications subject to formal quotation.
• All OEM names and trademarks belong to their respective owners.
• Website information is for reference only and is not final purchase specification.

Contact SemiStar

SS380-MSP-75