Description
Refurbished Cambridge NanoTech Savannah S200 ALD Atomic Layer Deposition System
SemiStar Corp. offers one refurbished Cambridge NanoTech Savannah S200 ALD Atomic Layer Deposition System located at our Morgan Hill, California, USA facility. This system is available in refurbished condition with OEM specifications, subject to final inspection, configuration confirmation, and prior sale.
The Savannah S200 is a thermal ALD system designed for research, university, semiconductor, compound semiconductor, MEMS, nanotechnology, and advanced materials thin-film deposition applications. The system supports substrates up to 200 mm / 8 inch and is suitable for conformal thin-film deposition on complex and high-aspect-ratio structures.
Product photos are for reference only. Actual system configuration, accessories, and cosmetic condition should be confirmed by SemiStar’s final quotation and inspection report.
Availability
| Equipment Model | Cambridge NanoTech Savannah S200 ALD |
| Equipment Type | Atomic Layer Deposition System |
| Manufacturer / OEM | Cambridge NanoTech / Veeco Cambridge NanoTech / Ultratech |
| Condition | Refurbished, used good condition |
| Quantity | 1 set |
| Location | Morgan Hill, CA, USA |
| Lead Time | Estimated 6–10 weeks, depending on PO timing and final PO conditions |
| Warranty | 6 months after shipment, subject to final quotation terms |
| Installation / Training | Available if necessary; scope and cost to be confirmed |
| Price | Contact SemiStar by filling out the inquiry form below |
| Validity | Subject to prior sale without notice |
| Internal Reference | OEM-Veeco-ALD-6 |
System Description
The Cambridge NanoTech Savannah S200 ALD system is designed for atomic layer deposition of conformal and uniform thin films. The system uses high-speed pneumatic pulse valves and supports Exposure Mode processing, which is useful for thin-film deposition on ultra-high-aspect-ratio substrates.
This configuration can be used for depositing conformal and uniform films on substrates with aspect ratios greater than 2000:1, depending on process chemistry, substrate structure, recipe, and operating conditions.
Current Configuration
- Cambridge NanoTech Savannah S200 ALD system
- Wafer size capability: up to 200 mm / 8 inch
- High-speed pneumatic pulse valve configuration
- Exposure Mode capability for high-aspect-ratio structures
- Ozone generator included
- Vacuum pump included
- Previously complete, working, and functionally tested
- Currently crated
- Approximate crated dimensions: 3 ft × 5 ft × 4.5 ft
- Approximate weight: 466 lb
Process / Chemistry Information
Listed process gases / chemistries include:
- Ozone
- Trimethylaluminum / TMA
- Diethylzinc / DEZ
- Ammonia, anhydrous
Final chemistry compatibility, precursor delivery configuration, safety requirements, exhaust requirements, and facility interface must be reviewed before purchase.
Typical Applications
- Atomic layer deposition for semiconductor R&D
- Compound semiconductor thin-film research
- MEMS and nanotechnology applications
- High-aspect-ratio conformal coating
- Dielectric thin-film deposition
- Metal oxide and functional film research
- University, research institute, and advanced materials laboratory use
Facility Requirements
- Electrical: 115 V, 50/60 Hz, 20 A, CE
- Process gas and precursor supply by customer unless otherwise quoted
- Exhaust connection and safety interlock review required
- Vacuum pump installation and maintenance responsibility to be confirmed
- Ozone and ammonia safety requirements must be reviewed by customer facility/EHS team
- Customer is responsible for site preparation, utilities, gas cabinets, abatement, exhaust, safety compliance, and local code compliance unless specifically included in the quotation
Refurbishment and Support
SemiStar can provide the equipment in refurbished condition with OEM specifications. Refurbishment, functional testing, installation, training, and warranty scope will be confirmed based on the final purchase order, system condition, customer requirements, and facility readiness.
The standard offering includes a 6-month warranty after shipment unless otherwise stated in the official quotation. Installation and training can be quoted separately if required.
RFQ Information Requested
To help us confirm the best quotation and support scope, please provide the following information:
- Substrate size, material, and sample type
- Target film materials and process chemistries
- Required precursor lines and gas configuration
- Need for ozone, ammonia, or other special chemistry support
- Expected process temperature range
- Required installation, training, or startup support
- Facility readiness, exhaust, safety, and gas handling status
- Required delivery schedule
- Budget range and expected purchase date
Important Notes
- Subject to prior sale without notice.
- Final specifications are subject to SemiStar’s official quotation and inspection confirmation.
- All OEM names, trademarks, and model names belong to their respective owners.
- SemiStar is not the OEM. Product information is provided for reference only and should not be used as final purchase specifications.
- Final purchase specifications, warranty terms, lead time, installation scope, and commercial terms must follow SemiStar’s official quotation.