Description
Varian 3120 Electron Beam Evaporator Bell Jar Thin Film Deposition System
SemiStar Corp. offers two sets of the Varian 3120 Electron Beam Evaporator System for semiconductor, university, research institute, optical coating, compound semiconductor, and advanced materials thin film deposition applications.
The systems are available in:
- AS-IS condition
- Refurbished condition with OEM specifications
Please contact SemiStar Corp. for current availability, refurbishment scope, additional photos, and quotation.
Photos shown are for reference only. Actual configuration, installed accessories, options, and condition may vary. Final specifications are subject to formal quotation.
Availability
- Two sets available
- Varian 3120 electron beam evaporator systems
- Bell jar vacuum deposition configuration
- Four-pocket electron beam gun configuration
- Available AS-IS condition
- Available refurbished condition with OEM specifications
- Warranty available for refurbished systems under formal quotation terms
- Installation and startup support available if applicable
- Subject to prior sale
Current Configuration
- Varian 3120 electron beam evaporator with bell jar
- Model 980-2461-B
- Four-pocket electron beam gun
- Airco Temescal power supply
- Airco Temescal CV-8 controller
- Inficon IC6000 deposition controller
- Varian 843 ionization gauge
- Varian Process Control 980-6100
System Description
The Varian 3120 is a bell jar style electron beam evaporation platform designed for thin film deposition applications including semiconductor processing, optical coating, compound semiconductor research, lift-off processes, and advanced materials development.
The available systems include four-pocket electron beam gun configuration, Airco Temescal high voltage power supply and controller package, deposition rate monitoring capability, and vacuum process controls.
Bell jar style electron beam evaporators are commonly used in university laboratories, pilot production environments, semiconductor research facilities, and optical thin film applications.
Electron Beam Evaporation Configuration
- Electron beam evaporation process capability
- Four-pocket electron beam gun
- Airco Temescal power supply
- Airco Temescal CV-8 controller
- Inficon IC6000 deposition controller
- Varian Process Control 980-6100
- Varian 843 ionization gauge
- Bell jar vacuum chamber configuration
Typical Applications
- Electron beam thin film deposition
- Metal evaporation
- Optical coating research
- Semiconductor material research
- Compound semiconductor processing
- Lift-off process applications
- University and institute R&D applications
- Advanced materials development
- Laboratory vacuum coating applications
Reference Specifications
| System Type | Electron beam evaporator thin film deposition system |
| OEM | Varian |
| Model | 3120 |
| Model Number | 980-2461-B |
| E-Beam Gun | Four-pocket electron beam gun |
| High Voltage Power Supply | Airco Temescal power supply |
| Controller | Airco Temescal CV-8 |
| Deposition Controller | Inficon IC6000 |
| Ionization Gauge | Varian 843 |
| Process Controller | Varian Process Control 980-6100 |
| Quantity Available | 2 systems |
| Condition | Available AS-IS or refurbished with OEM specifications |
Sales Conditions
AS-IS Condition
- System sold in current condition
- No refurbishment included unless separately quoted
- Recommended for customers with internal engineering and refurbishment capability
- Final included components to be confirmed before purchase
Refurbished Condition with OEM Specifications
- System inspection and condition report
- Vacuum chamber cleaning
- Vacuum leak check
- Electron beam source inspection
- Power supply verification
- Vacuum and cooling system verification
- Electrical and interlock inspection
- Functional test before shipment if applicable
- Warranty available under formal quotation terms
- Installation and startup support available if applicable
Reference Facility Requirements
The following facility requirements are provided for reference only. Final requirements must be confirmed based on actual system configuration and final quotation scope.
| Electrical Requirements | AC 208 V, 3 phase, 100 A, 50/60 Hz, 5-wire with active neutral and equipment ground; tolerable voltage ±5% |
| Cooling Water | Filtered 3.5 gpm at 50 psig inlet pressure, 60 to 80°F. Chiller or PCW plant cooling water may be used. |
| CDA | Approximately 25 cfm at 60 to 125 psig inlet pressure, filtered and dried |
| Nitrogen Purge | Approximately 10 cfm at 30 psi |
| LN Cooling | Approximately 1.5 gallons |
Reference Footprint
| Main Frame with Chamber | 38 in. W × 45 in. D × 110 in. H |
| DC Power Supply | 30 in. W × 40 in. D × 28 in. H; approximately 5 ft to main frame and 2 ft to dry pump |
| Control Cabinet | 22 in. W × 27 in. D × 80 in. H; approximately 2 ft to main frame |
| Dry Pump Reference | 16 in. W × 38 in. D × 22 in. H; approximately 2 to 3 ft to main frame |
| Mobility | Main unit has no wheels. Other modules may have wheels. |
Facility Notes
- CV-8 power supply is approximately 8 kW and may require approximately 50 A for full load.
- Diffusion pump is approximately 5 kW and may require approximately 30 A.
- Main unit may require approximately 20 A.
- A power distribution box may be used to split AC power to major units.
- If customer wants to split AC power, at least two 30 A circuits and one 20 A circuit may be required.
- E-beam power may only run approximately 50–60% of full load depending on available facility power and configuration.
- A chiller may be used as the cooling water supply. The 3.5 gpm cooling water flow can be used for chiller selection.
RFQ Information Requested
- Preferred purchase condition: AS-IS or refurbished
- Substrate size and material
- Deposition materials
- Film thickness requirements
- Required deposition rate and uniformity
- Vacuum level requirements
- Facility location and available utilities
- Installation or training requirements
- Expected purchase timeline
Important Notes
- All configurations and specifications are subject to final inspection and formal quotation.
- Actual installed accessories, vacuum configuration, deposition sources, and controllers must be confirmed before quotation.
- AS-IS systems are sold in current condition without refurbishment unless otherwise specified.
- Refurbishment scope must be defined in final quotation before purchase order.
- Facility requirements are provided for reference only and may change depending on final system configuration.
- All OEM names and trademarks belong to their respective owners.
- Website information is for reference only and is not final purchase specification.