Description
Refurbished Hewlett-Packard / Agilent HP 4062UX Semiconductor Parametric Test System
SemiStar Corp. offers refurbished Hewlett-Packard / Agilent HP 4062UX, HP 4062C, and HP 4062F semiconductor parametric test systems for precision DC and capacitance measurements. We currently have multiple HP 4062 systems and major sub-modules in stock, including HP 4142B, HP 41421B, HP 41420A, HP 41424A, HP 41425A, HP 4280A, HP 4284A, HP 4085B and related switching matrix modules. Systems can be configured according to customer requirements and supplied as complete, working, final-tested systems.
The HP 4062 series is widely used for semiconductor wafer-level electrical characterization, process monitoring, device development, and production parametric testing. Typical applications include DC I-V measurement, capacitance measurement, MOS device testing, wafer probing, and semiconductor process control.
Photos and descriptions are for reference only. Final system configuration, condition, and included accessories shall be confirmed in SemiStar’s official quotation.
Available Systems and Modules
- HP 4062UX semiconductor parametric test systems
- HP 4062C / HP 4062F configurations, depending on inventory
- HP 4142B DC source/monitor mainframe
- HP 41421B Source Monitor Units
- HP 41420A high-resolution SMU
- HP 41424A voltage source / voltage monitor module
- HP 41425A analog feedback unit
- HP 4280A CMU
- HP 4284A CMU
- HP 4085B / HP 4084 switching matrix related modules, depending on inventory
System Description
The HP 4062C, HP 4062UX, and HP 4062F systems are semiconductor parametric test systems designed to perform precision DC and capacitance measurements. These systems integrate DC measurement instruments, switching matrix subsystems, capacitance measurement capability, and wafer prober interface functions.
Accuracy and performance depend on final system configuration, calibration condition, warm-up time, environmental temperature, and installed modules. Historical Hewlett-Packard specifications typically reference calibration at 23°C ±5°C after sufficient warm-up time. Any performance data shown on this page is provided for reference only and is not a warranted specification unless confirmed in SemiStar’s official quotation.
Measurement Functions
- DC current measurement
- DC voltage measurement
- Capacitance measurement
- Conductance measurement
- Pulse force measurement, optional
DC Measurement Modes
- Spot measurement
- Sweep measurement
- Pulse measurement
- Pulse sweep measurement
- Analog search
Switching Matrix Capability
| Model | Measurement Pins | Instrument Ports |
|---|---|---|
| HP 4062C / HP 4062UX | Up to 96 pins | Up to 17 ports; all ports can access all 96 measurement pins |
| HP 4062F | Up to 48 pins | Up to 20 ports; 8 ports can access all 48 measurement pins, and 12 ports can access 4 measurement pins per port |
Typical DC Measurement Subsystem
The DC measurement subsystem is based on the HP 4142B modular DC source/monitor mainframe and plug-in modules. The modular design allows different configurations depending on application requirements.
A typical general-purpose configuration may include:
- HP 4142B DC source/monitor mainframe
- HP 41421B Source Monitor Units
- HP 41420A high-resolution SMU
- HP 41424A voltage source / voltage monitor module
- HP 41425A analog feedback unit
The HP 4142B mainframe has 8 available slots. Please note that the HP 41420A SMU requires two slots.
Typical Measurement Ranges
- High-resolution SMU: approximately ±20 fA to ±1 A, ±40 µV to ±200 V
- High-current SMU, Kelvin: approximately 2 pA to ±1 A, ±40 µV to ±200 V
- SMU, Kelvin: approximately 2 pA to ±1 A, ±40 µV to ±200 V
- GNDU, Kelvin: 0 V output
- VS/VMU AUX ports: output range approximately ±1 mV to ±40 V
Capacitance and Conductance Measurement Options
Capacitance measurement capability is available depending on installed modules and final configuration.
| Module | Typical Capability |
|---|---|
| HP 4280A CMU | 1 MHz test frequency; capacitance and conductance measurement capability; DC bias capability up to ±100 V |
| HP 4284A CMU | 1 kHz, 10 kHz, 100 kHz, and 1 MHz test frequencies; capacitance and conductance measurement capability; DC bias capability up to ±40 V |
Switching Matrix Subsystem
The HP 4062 switching matrix subsystem consists of a switching matrix and controller. Available matrix configurations may include:
- HP 4085B switching matrix, up to 48 pins
- HP 4089B switching matrix, up to 96 pins
- HP 4085F switching matrix, up to 48 pins for HP 4062F
HP 4085B and HP 4089B are generally used with HP 4062C and HP 4062UX systems. HP 4085F is generally used with HP 4062F systems.
Typical Switching Matrix Specifications
- Maximum DUT pins: 48 pins with HP 4085B/F; 96 pins with HP 4089B
- HP 4062C/UX: 9 main ports including SMU ports, AUX ports, and GNDU port
- HP 4062F: up to 20 ports including SMU, AUX, GNDU, and high-frequency pulse ports
- Maximum voltage between two SMU ports: approximately ±400 V
- Maximum voltage between SMU and AUX port: approximately ±300 V
- Maximum voltage between AUX ports: approximately ±200 V
- Maximum current port to DUT pin: up to ±1.6 A for GNDU, up to ±1 A for SMU ports
Optional High-Frequency Pulse Force
Depending on configuration, the HP 4062 system may support optional high-frequency pulse force capability using an HP 8110A pulse generator.
- Pulse level: up to approximately ±19 V at open load
- Pulse period: approximately 350 ns to 999 s
- Pulse width: approximately 50 ns to 999 ms
- Transition time: approximately 20 ns to 200 ms
Customized Configuration Capability
SemiStar can configure the HP 4062 system according to the customer’s test requirements and available inventory. Configuration may include DC measurement modules, switching matrix, capacitance measurement modules, prober interface, computer/controller, cables, and related accessories.
Because HP 4062 systems are legacy platforms, final configuration should be reviewed carefully before purchase. Please provide your required measurement functions, number of pins, wafer prober model, SMU requirements, capacitance measurement requirements, software needs, and any existing test programs or application requirements.
Typical Applications
- Semiconductor parametric testing
- Wafer-level device characterization
- MOS capacitor and transistor testing
- DC I-V measurement
- C-V measurement
- Process monitoring
- University, R&D, and semiconductor fab applications
Refurbishment and Final Test
SemiStar sells HP 4062 systems as complete, working, final-tested systems with customized configuration. Available refurbishment and test scope may include system inspection, module verification, cable check, controller check, system communication check, switching matrix check, and basic measurement verification.
Final acceptance criteria, calibration requirements, software backup, prober integration, and on-site installation support should be defined before quotation.
RFQ Information Required
To prepare a suitable quotation, please provide the following information:
- Required model: HP 4062UX, HP 4062C, HP 4062F, or equivalent configuration
- Required number of DUT pins
- Required SMU quantity and measurement range
- Capacitance measurement requirement: HP 4280A, HP 4284A, or other
- Wafer prober brand and model
- Required wafer size
- Existing software, test program, or application requirement
- Required accessories, cables, and fixtures
- Installation and training requirement
- Expected purchase timeline and budget range
Important Notes
- HP, Hewlett-Packard, Agilent, and Keysight names are trademarks of their respective owners.
- SemiStar is not affiliated with Hewlett-Packard, Agilent, or Keysight.
- All descriptions are provided for reference only and are not purchase specifications.
- Final configuration, included modules, accessories, test scope, warranty, and delivery terms shall be confirmed in SemiStar’s official quotation.
- Legacy systems may have obsolete components, software limitations, and limited OEM support. Customer should confirm application compatibility before purchase.
- Subject to prior sale.