Description
Ultratech 1500 Wafer Stepper
Condition: Used. Refurbished.
Quantity: 2 sets
Model 1500 High Volume Workhorse. The UltraStep 1500 Big Field 1:1 Projection Stepper System exposes reticle images in a step-and-repeat manner onto 2″, 3″, 4″, 5″, and 6″ wafers with fine line resolution ( 1.0um standard, .8um optional) and tight overlay accuracy.
The UltraStep 1500 features include:
- A larger exposure field versus earlier models, permitting large die exposure,and increased throughput.
- An electronic focus system which permits more accurate and repeatable substrate positioning in the focal plane, allowing the system to print 1.0um and 0.8um resolution geometry in a production mode.
- Electronic target detectors allow simultaneous, independent left and right target scans.
- 944 servo boards provide more stability during movement and exposure.
- Cast illuminator coupled with upgraded optics allow for lower exposure field uniformity.
The low cost and compact design of the UltraStep 1500 make it an ideal choice for chipmakers upgrading from older equipment. The UltraStep 1500 can be integrated in a mix-and-match scenario with other, higher resolution steppers, maximizing throughput while minimizing production costs.
SPECIFICATIONS:
- Wafer Size: 3”, 4”, 5”, 6”, or 8”
Loader Type: Automation / Manual
Computer: HP 362 w/Hard Disk
Uniformity: 2.5 %
Depth of Focus: 3.0 ums @ 1.0um lines
Maximum Square: 18 x 18 mm
Maximum Aspect: 39 x 11.4 mm
Maximum Area: 34.2 x 13.6 mm
Reticle Size: 3” x 5” x 0.090”
Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-OEM-1-2-1-2/3 SS10634
