Description
Ultratech 1000 Cost Effective Sub-Micron Workhorse Projection Stepper System
Condition: Used. Refurbished.
Quantity: 2 sets
Cost Effective Micron Level Workhorse. The UltraStep 1000 Wide Field 1:1 Projection Stepper System exposes reticle images in a step and-repeat manner onto 3″, 4″, 5″, and 6″ wafers with fine line resolution ( 1.25um standard, 1.0um optional) and tight overlay accuracy.
The low cost and compact design of the UltraStep 1000 make it an ideal choice for chipmakers upgrading from older equipment to the more advanced UltraStep 1000.
The UltraStep 1000 can be integrated in a mix-and-match scenario with other, higher resolution steppers, maximizing throughput while minimizing production costs.
The Intelligent Autoloader included with this system allows the user to program custom belt speeds and sensor tolerances. This versatility results in successful wafer loads regardless of substrate size or thickness.
The system is equipped with the HP 362 computer system. The internal 500MB hard disk can store up to 20,000 recipe files.
SPECIFICATIONS:
- Wafer Size: 3”, 4”, 5”, 6”
Loader Type: Intelligent / Manual
Computer: HP 362 with Hard Disk
Uniformity: 3.0 %
Depth of Focus: 5.0 ums @ 1.25um lines
Maximum Square: 14.1 x 14.1 mm
Maximum Aspect: 30 x 9.5 mm
Maximum Area: 27.5 x 10.6 mm
Reticle Size: 3” x 5” x 0.090”
Valid time: Subject to prior sale without notice. This is only for end user. Appreciate your time.
Contact us (sales@semistarcorp.com) for more info pls. Appreciate your time.
ID-OEM-1-2-1-7/8 SS10634
