Description
Typical equipment for Lab/Fab. Please contact us for the equipment availability. Appreciate your time.
Thin Film Deposition(Sputter/Evaporator/ALD/CVD/PECVD)
- Anatech Hummer Gold Coater
- Cambridge Nanotech Fiji Atomic Layer Deposition System
- Commonwealth Scientific Ion Beam Deposition System
- CVC Connexion Sputtering System
- GVD iCVD System
- GVD oCVD System
- Kurt Lesker PVD 75 Electron Beam Evaporator
- Kurt Lesker PVD 75 Sputtering System
- Leybold Heraeus Z-400 Sputtering System
- Leybold Heraeus Z-650 Sputtering System
- Perkin Elmer 6J Sputtering System
- Perkin Elmer 8L Sputtering System
- Perkin-Elmer 4400
- Perkin-Elmer 4450
- SCS Labcoter 2 Parylene Deposition System
- Tegal AMS Aluminum Nitride Sputtering System
- Trion Orion II PECVD
- Ultek E-Beam Evaporator
Dry Etching
- Plasma-Therm Versaline ICP RIE
- AW-901eR
- AW-903eR
- STS Aspect AOE
- STS Aspect ICP
- STS Multiplex ICP RIE
- Micrion 2500 Focused Ion Beam System
- Commonwealth Scientific Ion Mill
- Commonwealth Scientific Ion Mill #2
- Plasma-Therm 790 RIE
- Trion Phantom II RIE
- IPC Barrel Etcher
- AW-105R
- AW-B3000
- AW-1008
- Samco UV-1 Ozone Cleaner
Electron Beam Lithography
- FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
- FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
- Elionix ELS-G100 Electron Beam Lithography System
Photolithography
- Nikon NSR-1505G4 Stepper
- Heidelberg DWL 66FS Laser Lithography System
- Heidelberg DWL 66 Laser Lithography System
- Karl Süss MA6/BA6 Contact Aligner
- Karl Süss MA56 Contact Aligner
- Karl Süss MJB3 Contact Aligner
- YES HMDS Vapor Prime Vacuum Oven
- CEE 100 Spray Developer
- CEE 100CB Table Top Spinner/Hotplate
- CEE 100CB Bench Mount Spinner/Hotplate
- Solitec Photoresist Spinner
- Despatch Convection Oven – 90 ºC
- Blue M Oven – 120 ºC
- Photoresist Refrigerator
- ASML 5500/80 i-Line Wafer Stepper
Thermal Processing
- AG Heat Pulse 610i Rapid Thermal Annealer
- AccuThermo AW 820V Rapid Thermal Process
- AccuThermo AW 820 Rapid Thermal Process
- AccuThermo AW 810 Rapid Thermal Process
- AccuThermo AW 610 Rapid Thermal Process
- AccuThermo AW 410 Rapid Thermal Process
- AG Associates Heatpulse 610 Rapid Thermal Processor
- AG Associates Heatpulse 210
- AG Associates Minipulse 310
- AG Associates Heatpulse 410
- Micro Magnetics SpinTherm 1000 Magnetic Annealing System
- 2″ Tube Annealing Furnace
- Blue M Variable Temp Ovens
- Hotpack Vacuum Oven
- Hotplates
Inspection and Metrology
- FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
- FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
- Olympus MX80 Inspection Microscope
- Olympus BH Inspection Microscope
- Olympus Widefield Zoom Microscope
- Micromanipulator Probe Stations
- KLA Tencor P-15 Profilometer
- Tencor P-2 Profilometer
- Tencor Alpha-Step 200 Profilometer
- Nanometrics Nanospec 210XP
Wet Chemistry
- Semitool 870 Spin Rinser/Dryer
- Semitool 880 Spin Rinser/Dryer
- Semitool 270 Spin Rinser/Dryer
- Tousimis Critical Point Dryer
- Copper Electroplating Bath
Back End and Post Processing
- Kulicke & Soffa 782-6 Dicing Saw
- Micromech Diamond Saw
- Strasbaugh 6EC CMP
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