Typical equipment for Lab/Fab

Description

Thin Film Deposition(Sputter/Evaporator/ALD/CVD/PECVD)

1. Anatech Hummer Gold Coater
2. Cambridge Nanotech Fiji Atomic Layer Deposition System
3. Commonwealth Scientific Ion Beam Deposition System
4. CVC Connexion Sputtering System
5. GVD iCVD System
6. GVD oCVD System
7. Kurt Lesker PVD 75 Electron Beam Evaporator
8. Kurt Lesker PVD 75 Sputtering System
9. Leybold Heraeus Z-400 Sputtering System
10. Leybold Heraeus Z-650 Sputtering System
11. Perkin Elmer 6J Sputtering System
12. Perkin Elmer 8L Sputtering System
13. Perkin-Elmer 4400
14. Perkin-Elmer 4450
15. SCS Labcoter 2 Parylene Deposition System
16. Tegal AMS Aluminum Nitride Sputtering System
17. Trion Orion II PECVD
18. Ultek E-Beam Evaporator

Dry Etching

1. Plasma-Therm Versaline ICP RIE
2. AW-901eR
3. AW-903eR
4. STS Aspect AOE
5. STS Aspect ICP
6. STS Multiplex ICP RIE
7. Micrion 2500 Focused Ion Beam System
8. Commonwealth Scientific Ion Mill
9. Commonwealth Scientific Ion Mill #2
10. Plasma-Therm 790 RIE
11. Trion Phantom II RIE
12. IPC Barrel Etcher
13. AW-105R
14. AW-B3000
15. AW-1008
16. Samco UV-1 Ozone Cleaner

Electron Beam Lithography

1. FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
2. FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
3. Elionix ELS-G100 Electron Beam Lithography System

Photolithography

1. Nikon NSR-1505G4 Stepper
2. Heidelberg DWL 66FS Laser Lithography System
3. Heidelberg DWL 66 Laser Lithography System
4. Karl Süss MA6/BA6 Contact Aligner
5. Karl Süss MA56 Contact Aligner
6. Karl Süss MJB3 Contact Aligner
7. YES HMDS Vapor Prime Vacuum Oven
8. CEE 100 Spray Developer
9. CEE 100CB Table Top Spinner/Hotplate
10. CEE 100CB Bench Mount Spinner/Hotplate
11. Solitec Photoresist Spinner
12. Despatch Convection Oven – 90 ºC
13. Blue M Oven – 120 ºC
14. Photoresist Refrigerator
15. ASML 5500/80 i-Line Wafer Stepper

Thermal Processing

1. AG Heat Pulse 610i Rapid Thermal Annealer
2. AccuThermo AW 820V Rapid Thermal Process
3. AccuThermo AW 820 Rapid Thermal Process
4. AccuThermo AW 810 Rapid Thermal Process
5. AccuThermo AW 610 Rapid Thermal Process
6. AccuThermo AW 410 Rapid Thermal Process
7. AG Associates Heatpulse 610 Rapid Thermal Processor
8. AG Associates Heatpulse 210
9. AG Associates Minipulse 310
10. AG Associates Heatpulse 410
11. Micro Magnetics SpinTherm 1000 Magnetic Annealing System
12. 2″ Tube Annealing Furnace
13. Blue M Variable Temp Ovens
14. Hotpack Vacuum Oven
15. Hotplates

Inspection and Metrology

1. FEI Sirion 600 SEM / JC Nabity NPGS E-Beam Lithography
2. FEI Sirion 400 SEM / JC Nabity NPGS E-Beam Lithography
3. Olympus MX80 Inspection Microscope
4. Olympus BH Inspection Microscope
5. Olympus Widefield Zoom Microscope
6. Micromanipulator Probe Stations
7. KLA Tencor P-15 Profilometer
8. Tencor P-2 Profilometer
9. Tencor Alpha-Step 200 Profilometer
10. Nanometrics Nanospec 210XP

Wet Chemistry

1. Semitool 870 Spin Rinser/Dryer
2. Semitool 880 Spin Rinser/Dryer
3. Semitool 270 Spin Rinser/Dryer
4. Tousimis Critical Point Dryer
5. Copper Electroplating Bath

Back End and Post Processing

1. Kulicke & Soffa 782-6 Dicing Saw
2. Micromech Diamond Saw
3. Strasbaugh 6EC CMP

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