Description
Temescal VES-2550 E-Beam Evaporation System with 2 Four Pocket E-Guns
- Thin film deposition system dual e-gun evaporator.
- Inficon IC4 crystal deposition monitor.
- Two four pocket electron guns with rotation controller.
- Temescal CV-8 E-Beam power supply.
- Currently configured with single fixed dome for 3 in. substrates
- Water cooled 25 in. ID chamber.
- Automatic or manual valve control.
- CTI cryopump with compressor and roughing pump.
SS263136926743
