Description
Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters
Used thin film deposition system.
This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance.
Cryo pumped high vacuum system with roughing pump.
4 pocket gun with Temescal CV-8 power supply.
Inficon IC4 Deposition monitor.
Bell Jar: 19-1/2 in. ID.
Single substrate dome 17 in. dia. with rotation control.
Includes substrate heaters.
Auto valve sequencer.
SS251320347481
