Description
Temescal FC-1800 E-Beam Thin Film Evaporator with Substrate Heaters
Used thin film deposition system.
System has a load lock for fast cycling of wafers.
Water cooled stainless steel bell jar.
Currently configured with lift-off dome for 4 in. dia wafers.
Quartz substrate heaters.
Automatic or manual valve controls.
Crystal film thickness monitor.
CV-8 8 kW e-beam power supply with sweep controller.
4 pocket e-gun with pocket selector.
Cryopump and roughing pump.
SS251320355498
