Description
Temescal BJD-1800 4 Pocket E-Beam Evaporator Upgraded by TES
- Used thin film deposition system.
- Inficon XTC/2 crystal deposition monitor/controller.
- Three dome planetary configuration for 3 in. wafers. Rotation control.
- All system components mounted in cabinet except cryo compressor.
- CTI cryopump compressor with roughing pump.
- Auto valve controller.
- 4 pocket e-gun with turret source selector.
- Niles Electronics NE-6 E-Beam power supply.
- X-Y sweep controller. Water cooled 17.5 in. ID bell jar.
SS251320329390
