Description
Tegal 900E Cassette to Cassette Photoresist Strip/Backside Etching
Cassette to Cassette Photoresist Strip/Backside Etching.
Spatula wafer transport from cassette to cassette.
Users are guided through programming and operation by menu-driven software and soft-keys via a built in display and an external terminal.
System is currently configured for 4 in. wafers.
SS251341230330
