Description
Model: STS Multiplex ICP Bosch Process
Photos: Download
Category: Etch RIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.
Vintage: 1999, CE Mark.
Valid Time: Subject to prior sale
Lead Time: 4 weeks for AS IS condition. 10 to 16 weeks for the Refurbished and fully tested condition.
Warranty: No warranty for the AS IS,WHERE IS condition. 12 months for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Surface Tech Sys (STS) STS Multiplex ICP Bosch Process Etcher Description:
STS Multiplex ICP Dry etcher, 8″
Includes: Handler
Chiller
Turbo pump
HF Generator
Carousel vacuum load lock
With 1 ICP SR + HR process chamber
Pumps: No
EPD: No
Wafer flat size: Other
Clamp: WTC
Gas box: Mini
ASE Requirement: Switched licence
Voltage: 400V
Gases:
C4F8 100 sccm
O2 100 sccm
Ar 100 sccm
He 100 sccm
SF6 100 sccm
Multiplex ICP process chamber (MESC)
ICP 240BF Source
RF Supply: 1 kW (13.56 MHz)
Matching unit for ICP source
Generator: 5 kW
RF Supply: 300 / 30 Watt (13.56 MHz)
Matching unit for lower electrode
Electrode temperature control: +5 to +40 deg C
Mechanical wafer clamping electrode (Pin lift)
With He backside cooling
LEYBOLD Turbo pump MAC 2000
Windows software control
Standalone VDU
Keyboard and mouse
BOSCH Licence
Gases: C4F8, SF6, Ar, He, O2
CE Marked
1999 vintage.