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STS MULTIPLEX ICP DRIE Bosch Process
STS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch ProcessSTS MULTIPLEX ICP DRIE Bosch Process

STS Multiplex ICP Bosch Process-8 inch

STS Multiplex ICP Bosch Process, Dry etcher, 8″,Handler ,Chiller, Turbo pump, HF Generator ,Carousel vacuum load lock,With HR process chamber. Vintage 1999

SKU: STS Multiplex ICP -1. Category: . Tags: , , .

Product Description

Model STS Multiplex ICP Bosch Process

Category:  Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Vintage: 1999, CE Mark.

Valid Time: Subject to prior sale

Lead Time: 4 weeks for AS IS condition. 10 to 16 weeks for the Refurbished and fully tested condition.

Warranty: No warranty for the AS IS,WHERE IS condition. 12 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS)  STS Multiplex ICP Bosch Process  Etcher Description:

STS Multiplex ICP Dry etcher, 8″

Includes: Handler

Chiller

Turbo pump

HF Generator

Carousel vacuum load lock

With 1 ICP SR + HR process chamber

Pumps: No

EPD: No

Wafer flat size: Other

Clamp: WTC

Gas box: Mini

ASE Requirement: Switched licence

Voltage: 400V

Gases:

C4F8 100 sccm

O2 100 sccm

Ar 100 sccm

He 100 sccm

SF6 100 sccm

Multiplex ICP process chamber (MESC)

ICP 240BF Source

RF Supply: 1 kW (13.56 MHz)

Matching unit for ICP source

Generator: 5 kW

RF Supply: 300 / 30 Watt (13.56 MHz)

Matching unit for lower electrode

Electrode temperature control: +5 to +40 deg C

Mechanical wafer clamping electrode (Pin lift)

With He backside cooling

LEYBOLD Turbo pump MAC 2000

Windows software control

Standalone VDU

Keyboard and mouse

BOSCH Licence

Gases: C4F8, SF6, Ar, He, O2

CE Marked

1999 vintage.

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