Description
Spare Parts for Varian 3180, 3190 and 3290 series sputtering systems
Please contact us for the availability of any of them. They are subject to prior sale without notice. Appreciate your time.
Thryster, Eurotherm, Analog · 831Controller, Motor Transfer Plate · 00-666255-00Controller, Fluke 1722A · 00-689807-01Controller, Eurotherm, Analog · 00-672160-00Controller, Vacuum TC · 275-094Power Pack, Eurotherm, Analog · 00-674424-00Meter, KWH, 3 Station · 04-715634-01Controller, MKS 250 · 250-1-D
| Controller |
| Gauge Tube, Convectron · 27-229979-00 |
| Controller, Eurotherm, Digital · 818S |
| Fluke Meter · 8408A |
| Gauge, TC · 810-2 |
| Controller, Ion Gauge · 845 |
| Controller, Multigage · L8350301 |
| Controller, Ion Gauge · 880 |
| Electrical |
| Circuit Breaker, 70A 480V · TED134070 |
| Circuit Breaker, 480V · 55-700165-00 |
| Counter, Digital · 66F114 |
| Proximity Sensor · Bi2UM12AN4XH1141 |
| Cylinder .75 Clevis · 27-999848-00 |
| Spcr,Insl.Ring R F Etch · 00-684273-00 |
| Lamo Lamp · 67-423000-00 |
| Proteus Flow Switch · 100 |
| Cable Assy. · 00-685209-00 |
| Cable, Reset, Power Fail · 00-666409-00 |
| Transformer, Power Supply · 44-149146-00 |
| Phase Discramenator Discr. · 00-666315-00 |
| Motor, Drive Assy. · 00-669840-00 |
| Cable, Convection Tube · 00-671720-00 |
| Cable, RF Bias · 00-673089-00 |
| Cable Assy. · 00-674987-00 |
| Cable, Assy Auto Zero · 00-685210-00 |
| Cable, Etch Ring · 00-666435-01 |
| Cable, Assy Coax · 00-672419-02 |
| Cable, Assy · 00-672072-00 |
| Fitting, Blank · 00-674625-00 |
| Port, Sight Flange · 04-673518-00 |
| Cable, Conmag 26 ft. · 00-680781-04 |
| Meter, Panel 3Kw · 00-673395-00 |
| Circuit Breaker, 20A · 55-700397-00 |
| RF Filter Assembly · 00-685100-00 |
| Firing Module · 00-674413-00 |
| Heater Transformer Assy. · 00-685759-01 |
| Cable, 26 Pin · 00-671898-16 |
| Cable Assy. · 00-677664-00 |
| Meter, Panel 15kW · 00-673275-00 |
| Cable Assy. · 00-674358-02 |
| Cable Assy. · 00-674359-02 |
| Cable Assy. · 00-674359-04 |
| Cable Assy. · 00-674358-01 |
| Cable Assy. · 00-674358-05 |
| Cable Assy. · 00-674359-01 |
| Switch, Vacuum 15″ · 00-674929-01 |
| Cable, Dbl End · 00-685454-00 |
| Connector · 53-965903-00 |
| Meter, Panel 3kW · 00-606098-00 |
| Diode · 31-223137-00 |
| Meter, 0-25 · 00-684442-00 |
| Meter 15kv Small Body · 00-684735-00 |
| Transformer · 00-685422-00 |
| Motor, Transfer Plate · 00-685511-00 |
| Kit, Proximity Switch Retro-Fit · 04-716925-01 |
| Relay, Solid State · 00-685529-00 |
| Gauge, Vacuum TC · F0472303 – 0531 |
| Cable, Ceramic Bead · 04-716946-02 |
| Fan, Cooling, Electronics Rack · 20-839934-00 |
| Thermocouple, Heater · 27-180262-00 |
| Switch, Reed · 27-999734-00 |
| Fuse, 2A 500V · 55-500053-00 |
| Fuse, 60A 600V · 55-500300-00 |
| Fuse, 35A 600V · 55-500302-00 |
| Fuse, 100A 700V · 55-500384-00 |
| Sensor, Slow/Stop · 66-601004-00 |
| Sensor, Light Source · 66-601005-00 |
| Fuse, 12A · 67-119057-00 |
| Switch, Micro · 71-429924-00 |
| Switch, Thermostatic · 71-629943-00 |
| Switch, Air Flow · 71-699124-00 |
| Switch, Contact · 71-999738-00 |
| Relay, R-10 · 72-106029-00 |
| Relay, Motor Timing · 73-409318-00 |
| Photo Amplifier · 78-197050-00 |
| Photo Detector Assy. · 00-685295-00 |
| Sensor, Bridge Coil · 00-666164-00 |
| Cable Assy. · 00-674981-00 |
| Meter, 15 KW · 04-718753-03 |
| Meter, Panel 2-KV · 00-684733-00 |
| TC, Vacuum · 27-229907-00 |
| Array, Charcoal 2nd Stage · 323-0101 |
| Switch, 28″ HG · 00-674929-00 |
| Switch, 60 PSIG · 00-671150-00 |
| Switch, 35 PSIG · 00-673190-00 |
| Switch, 10 PSIG · 00-674927-01 |
| Switch, 10″ HG · 00-674930-01 |
| Switch, Reed Magnetic · 00-672552-00 |
| Cable Simulator Kit · PTS-10, CB254-2 |
| Transducer, Pressure · 127AA-00001E |
| Cable, Pressure Control · CB-258-1-10 |
| Sensor, Amp. Opt. · 08-197050-00 |
| Sensor, Photo Detector · 66-601006-00 |
| Temp. Plate, 8 Position · 101-8-176-C |
| Fuse, 10A 240V, Eurotherm · 55-500005-00 |
| Transistor · IRF 131 |
| Valve, Solenoid, 24VDC · MC41E1-24VDC |
| Fuse, 10A 250V · 67-130510-00 |
| Fuse, 12A 250V · L25S-12 |
| Relays · ODC-5 |
| Relay · 72-164874-00 |
| Relay, 24VDC · 72-115963-00 |
| Relay, 24VDC · R10-E1-X2-V700 |
| Relay, 6VDC · R10-E1-Y2-SS500 |
| Relay · W93X11-2-15 |
| Switch, Toggle · UT2N-1 |
| Switch, 30″ HG · V110-31W-X/6284 |
| Potentiometer · 3540S-1-502 |
| Motor, Quantum · 04-722924-01 |
| Rectifier, High Voltage · 00-674414-00 |
| Diode Bridge · SKK021-16 |
| SCR · 00-431490-00 |
| Sensor, Drive Motor · 04-716650-01 |
| Sensor, Prox. Switch · 00-678149-01 |
| Heater Element 5″ · 00-672255-00 |
| Sensor, Wafer · 00-674685-00 |
| Sensor, Drive Motor Assy. · 00-674704-00 |
| Ribbon Cable · 00-674948-00 |
| Switch, Actuator · 71-999885-00 |
| Switch, Micro · 71-249829-00 |
| Fuse Kit · 62-010004-00 |
| Motor, Wafer Handler · 00-684049-00 |
| Cable · CB2151/248 |
| Rotation Sensor · 04-707856-03 |
| Switch, Reed Assy. · 00-678618-01 |
| Heater Element, 4″ · 00-672256-00 |
| Cable, Ion Gauge, 845 · 27-299955-00 |
| Hardware |
| Capacitor · 41-299824-00 |
| Capacitor · 41-299834-00 |
| Screw, 1/4 20×2 · 953-5001 |
| Screw, 12p 25-28 · 12-352064-22 |
| Flange Igniter Blankoff · 00-681062-00 |
| Gasket, Indium · 00-659454-00 |
| Screw, Shoulder, 3/8L · 41424 |
| TC Cable · 00-674378-00 |
| Hose Cooling Kit, H2O · 00-672216-00 |
| Sprocket, Weldmont · 00-664011-00 |
| Spacer Guide, 5″ · 00-671123-00 |
| Clamp, Swivel · 22-999809-00 |
| Gage, Block Act. Clip · 00-671294-00 |
| Wafer Clip Block Gage · 00-671295-00 |
| L-Handle Jack · 00-671639-00 |
| Rack Cover Support · 00-680981-00 |
| Wafer Clip · 00-672057-00 |
| Valve Blocking Plate · 27-179859-00 |
| Clamp, Shutter, Weldmont · 00-672401-00 |
| Shutter, Actuator · 00-685405-00 |
| Centering Ring, St. Steel · KC-16-SV |
| Tool, Clip Actuator · 00-673156-00 |
| Cable, Light SKT · 00-685481-00 |
| Spring · 04-715875-01 |
| Screws, Set · 00-673941-00 |
| Bushing · 21-139921-00 |
| Screw, 10-32×1/4 Hex Hd. · 00-673943-00 |
| Shim · 00-671323-00 |
| Rod Mount · 00-674933-00 |
| Spring, Ceramic Ring Retainer · 00-674493-01 |
| Spring, Retainer · 00-674494-01 |
| Screen · 04-710636-01 |
| Filter · 27-590969-00 |
| Shim · 00-680559-00 |
| Gland · 00-674897-00 |
| Gasket, Copper · 09-535070-00 |
| Gasket, 4 1/2″ Copper · 09-535015-00 |
| Pin, Door · 00-664309-00 |
| Spacer, Flat Aligner · 00-671122-00 |
| Spring · 27-790201-00 |
| Clamp, Perforated Shutter · 00-678475-01 |
| conector, clamp · 51-969725-00 |
| Support Insert · 00-678476-01 |
| Gasket, Copper · 27-459860-00 |
| Spindle · 00-664367-00 |
| Detent Bracket, Support · 00-680563-00 |
| Screw, Capture, Mini-Qtm · 04-715871-03 |
| Filament, RF · 00-680734-00 |
| Bead, Ceramic · 24-813008-00 |
| Clamp · 00-680756-00 |
| Clamp · 00-680757-00 |
| Screen, Ion Gauge · 00-656161-00 |
| Magnet, Conmag I · 00-678859-01 |
| Spacer, Coil · 00-682266-00 |
| Bushing, 1/4 x 1/8 · 28-202011-00 |
| Screw · 11-612014-012 |
| Screw, 10-32 x 1/2 Pan Hd Phil · 12-222060-08 |
| Screw, 1/4-20 x 3/4 Soc Hd · 12-312014-12 |
| Shutter Key · 00-684648-00 |
| Screw, 1/4-20 x 1 Soc Hd · 12-312014-20 |
| Screw, 5/16-18 x 1 1/2 Soc Hd · 12-312015-24 |
| Screw, 10-32 x 1/2 Flt Hd Phil · 12-212060-06 |
| Screw, 6-32 x 1/4 Pan Hd Slt · 12-162006-04 |
| Screw, 6-32 x 1/4 Pan Hd Phil · 12-222006-04 |
| Screw, 4-40×1/8 Soc Hd · 00-673940-00 |
| Hex Nut, 10, Slip Washer · 13-312060-00 |
| Washer · 14-112015-00 |
| Ferrule, Comp. 1/4″ · 28-694006-00 |
| Ferrule, Teflon 5/16″ · 28-694578-00 |
| Washer, Plain Shim · 14-900054-00 |
| Washer, #6 · 14-122006-00 |
| Washer, Split · 14-212006-00 |
| Washer, Split · 14-212010-00 |
| Vented Screw · 00-685018-00 |
| Washer, Split · 14-212014-00 |
| Washer, Split · 14-212015-00 |
| Screen · 00-685019-00 |
| Clamp, Conmag Shutter · 00-685403-00 |
| Chain, Drive, Transfer Plate · 00-685508-00 |
| Foreline Trap · 00-685578-00 |
| Bolt, Shoulder · 00-689136-01 |
| Chain, Cassette Drive · 04-710791-01 |
| VCR, “T” Weldmont · 04-712042-01 |
| Spring, P/P Ram Shield · 04-712157-02 |
| Spring, L/L Ram Shield · 04-716733-01 |
| Filament, Hot · 04-717629-01 |
| Gaskets, Copper · 09-535014-00 |
| Gaskets, Copper · 953-5070 |
| Screw, Hex Head, 10-32X3/8 · 12-752060-06 |
| Screw · 12-900511-00 |
| Washer #8 SS · 14-122008-00 |
| Washer, Split · 14-202008-00 |
| Washers, Teflon · 14-999709-00 |
| Cotter Pins · 19-222992-00 |
| Roll Pin · 19-224763-00 |
| Roll Pin · 19-224820-00 |
| Pin, Quick Release, L/L Ram · 19-229899-00 |
| Ball Bearings · 21-109596-00 |
| Ring, Retainer · 22-678311-00 |
| Ring, Retaining · 22-678602-00 |
| Gasket, RF Chamber Gnd · 27-459874-00 |
| Cap, Cajon · 28-200012-00 |
| Fitting, 90 Street, Elbow · 28-205994-00 |
| Fitting, 3/8mpt x 3/4 Flare, Elbow · 28-611018-00 |
| Fitting, 1/4mpt x 1/4 Flare · 28-626907-00 |
| Fitting, 5/16 x 1/4 Elbow · 28-666986-00 |
| Fitting, Elbow 1/4mpt x 1/4fpt · 28-694052-00 |
| Fitting · 28-695039-00 |
| Fitting, Union, 1/4h x 1/4flr · 28-849913-00 |
| Fitting, Union 1/4 x 1/4 · 28-849954-00 |
| Drive Limit, Right Angle · 7055000-01 |
| Clamp · 800-02-40 |
| Bearing · 8FK6301J |
| Bellows, SS 1 1/2 · 953-0119 |
| Screw, Pressure Relief · 12-999835-00 |
| Pin, L/L Ram · 00-664444-00 |
| Sprocket, Weldment · 00-664068-00 |
| Chain, Cassette · 00-674029-00 |
| Chain Assy. · 00-684056-04 |
| Turnbuckle · 00-672232-00 |
| Roller, Flat Aligner, Ceramic · 00-664366-00 |
| Clamp, Ferrofludic · 113516 |
| Screw Kit, 3190 · K-3190 |
| Screw, Vented Sch. Cap · 8-32 x 14 |
| Screw, SCH Head · 8-32 x 34 |
| Screw, SCH Head · 8-32 x 38 |
| Screw, Vented Sch. Cap · 8-32 x 58 |
| Screw, Vented Sch. Cap · 8-32 x 78 |
| Shoulder Screw · 12-999546-00 |
| Screw, Set · 728-S0172-910 |
| Regulator Assy. · 00-685924-00 |
| Counter · H7ET |
| Cooling Pole Assy. · 00-672905-00 |
| Screw, Nylon · 12-900906-00 |
| Screw, Modified · 04-712210-02 |
| Anti-Rotation strap · 00-672257-00 |
| Sensor Cap · 00-674682-00 |
| Thrust Washer · 00-672448-00 |
| Clip Ring SST, 5″ · 00-678087-02 |
| Spring, Retainer 5″ Htr · 04-712265-01 |
| Spring, Retainer 4″ Htr. · 04-715838-01 |
| Sprocket, Idler · 00-674101-00 |
| Extension Shaft · 04-707854-01 |
| Screw, 8-32×1/2 Soc Hd · 12-312008-08 |
| Washer # 10 · 14-102010-00 |
| Screw, 10-32×5/16 Soc Hd · 12-312060-05 |
| Screw, 10-32×3/8 Soc Hd Vtd. · 12-600024-00 |
| Screw, 10-32×5/16 Hex Hd, Trimmed · 12-752060-05 |
| Screw, Vtd 6-32×1/4 Soc Hd · 12-600023-00 |
| Screw, Vtd 4-40×1/8 Soc Hd · 00-600067-00 |
| Screw, Set 4-40×1/4 · 11-652004-04 |
| Screw, 6-32×3/8 Vntd Pan · 12-600022-00 |
| Screw, Hex Hd 10x32x1/4 · 12-752060-04 |
| Sprocket Assy. · 00-681153-00 |
| Screw, Vntd 10-32×5/16 Soc Hd · 12-600025-00 |
| Screw, Vntd 10-32×5/16 Hex Hd · 12-600025-02 |
| Screw, 10-32×7/16 Soc Hd · 12-600034-00 |
| Screw, Vntd 4-40×3/16 Soc Hd · 12-600088-00 |
| Screw, 4-40×3/16 Soc Hd · 12-600067-00 |
| Screw, 6-32×1/4 Soc Hd · 21-752006-04 |
| Screw, 10-32×5/16 Soc Hd · 12-312060-05 |
| Screw, 10-32×1/2 Flt Hd Phil · 12-112060-08 |
| Screw, 10-32×1/2 Soc Hd · 12-752060-08 |
| Screw, 8-32×3/16 Hex Hd. Trimmed · 12-752008-03 |
| Screw, 10-32×3/8 Soc Hd · 12-751060-06 |
| Screw, 1/4-20×5/8 Soc Hd · 12-312014-10 |
| Screw, 4-40×1/8 Soc Hd · 12-312004-02 |
| 1/4×20 Screw, Shoulder · 12-999862-00 |
| Screw, Vntd 4-40×1/2 Pan Hd Slot · 4-40 x 1/2 |
| Screw, Vntd 4-40×1/8 Soc Hd · 4-40 x 1/8 |
| Screw, 1/4-20×1 Soc Hd · 1/4-20 x 1 |
| Screw, 10-32×1/2 Hex Hd · 10-32 x 1/2 |
| Screw, Vntd 6-32×1/4 Soc Hd · 6-32 x 1/4 |
| Screw, Vntd 8-32×1/4 Soc Hd · 8-32 x 1/4 |
| Screw, 8-32×1/4 Flt Hd Phil · 8-32 x 1/4 |
| Screw, 8-32×1/2 Soc Hd · 8-32 x 1/2 |
| Screw, 10-32×1/4 Hex Hd · 10-32 x 1/4 |
| Screw, 1/4-20×3/6 Soc Hd · 1/4-20 x 3/6 |
| Screw, Vntd 10-32×3/8 Hex Hd · 10-32 x 3/8 |
| Screw, 6-32×1/4 Pan Hd Phil · 6-32 x 1/4 |
| Set, Screw/Nut 1/4-20 x 3/4 · 953-5044 |
| Washer, Turner · 00-684046-00 |
| Bearing, Needle · 21-128808-00 |
| Wire, Filament Tungsten · 00-680992-00 |
| Spring, Retainer 6″ Htr · 04-712167-01 |
| Screw, Flat Head, 1/2×20 · 12-333968-56 |
| Cooling Band Assy., Conmag · 00-664257-01 |
| Inserts, Transfer Plate · 00-664443-00 |
| Magnet, Mini-Quantum Assy. · 04-716498-01 |
| Insulator, Table, 5″ · 00-674826-00 |
| Tube, Heat Exchanger Inlet · 00-664268-01 |
| Clip Ring SST, 6″ · 00-678087-04 |
| Insert, Central Pole Piece · 00-682229-00 |
| Hub, Modular · 04-709833-01 |
| Shaft, Rotor · 04-707628-01 |
| Bearing, Seal Assy., Qtm · 04-709847-01 |
| Collar · 04-707848-01 |
| Screw, 4-40×5/8 Vtd · 12-600062-00 |
| Anti-Rotation Strap, 3290 · 00-683166-00 |
| Screw, Vntd, SCH, 8-32X875 · 12-600056-00 |
| Screw, Vnt, 8-32×1/4 FHP · 12-600020-00 |
| Screw, Shoulder · 12-999541-00 |
| Bearing, B-67 · B-67 |
| Anode, Conmag · 00-664178-00 |
| Transfer Plate Diamond Pin · 00-664274-00 |
| Ram Pad · 04-712188-02 |
| Screw, Socket Hd., 3/8-16×1 · 12-312016-20 |
| Set Screw, 6-32×1/4 · 11-622006-04 |
| Ball Bearing · 21-109605-00 |
| Ram Pad · 04-712186-02 |
| Spring Plunger · 22-999967-00 |
| Insulator, 4″ Etch Ring · 00-684270-00 |
| Roll Pin · 19-224954-00 |
| Chain, Transfer Plate 3290 · 00-685508-04 |
| Roll Pin · 19-224762-00 |
| Roll Pin · 19-224968-00 |
| Wafer Lifter Stop · 00-680524-00 |
| Brass Bushing · 14-999775-00 |
| Roll Pin · 19-224978-00 |
| Ring Retainer · 22-678967-00 |
| Roll Pin · 19-224774-00 |
| Roller, Flat Aligner · 00-678772-03 |
| Bearing, Thrust · 00-680917-00 |
| Bearing, Flanged · 21-139743-00 |
| Kits |
| Kit, Target · OPT-1491 |
| O-Rings |
| Seal Kit, 2.0-2.5 Bore · 20635 |
| Kit, Rebuild, Hi Vac · 09-830025-00 |
| Seal, Bellows · 00-600055-01 |
| ORing Kit · 3009 |
| O-Ring, Chamber 3180 · 00-674856-00 |
| O-Ring · 27-409334-00 |
| O-Ring · 27-409334-00 |
| O-Ring · 27-403016-00 |
| O-Ring · 27-409092-00 |
| Seal, Rubber · 00-953009-30 |
| O-Ring, Heater · 27-402602-00 |
| O-Ring Retaining Tool · 00-687127-01 |
| O-Ring Vac Kit · 00-694788-01 |
| Door O-Ring, 3290 · 00-683302-00 |
| O-Rings · 09-530017-00 |
| O-Ring · 27-402265-00 |
| O-Ring · 27-402382-00 |
| O-Ring · 27-402463-00 |
| O-Ring · 27-402625-00 |
| O-Ring Drive Belt · 27-402746-00 |
| O-Ring, Main Seal · 27-403021-00 |
| O-Ring Bonnet Seal · 27-403029-00 |
| Seal, Rubber · 27-459600-00 |
| Quad Ring · 27-459655-00 |
| O-Ring, Four Lobed · 27-459656-00 |
| O-Ring, Four Lobed · 27-459657-00 |
| O-Ring Kit, 3290 · MCD 8214 |
| Quad Ring · Q4222 |
| Quad Ring · Q4228 |
| Kit, Rebuild Alkon LL Ram · 20738 |
| Kit, Rebuild Rod Seal · 20734 |
| Quad Ring · 27-459663-00 |
| Gasket, Viewport · 00-643545-02 |
| O-Ring · 27-402620-00 |
| Other |
| Rotor Assembly · 00-685098-00 |
| Rotor, Proteus · P-100 |
| Water Flow Switch · 71-625042-00 |
| Kit, Retrofit Dual · 00-685045-00 |
| Load Lock Manifold · 00-684375-00 |
| Roller, Flat Aligner · 00-678302-01 |
| Insulator · 00-641737-05 |
| Mount, Clip Cylinder · 00-664343-00 |
| Clamp · 00-664080-06 |
| Cover, Blank Off · 00-664231-00 |
| RF Match Box Assy. · 00-671684-01 |
| RF Etch Head · 00-674880-00 |
| Pressure Plate RF Hue Bias · 00-685582-00 |
| Transfer Plate Assy., 5″ · 00-674776-00 |
| Heater Assy., 5″ · 00-684878-00 |
| Bellows · 09-530119-00 |
| Lock Cylinder Assy. W/Key · 00-670594-00 |
| Source, Conmag Assy. · 00-664224-02 |
| Shaft, LL Ram · 00-684096-00 |
| Insulator, Etch Ring · 00-684291-00 |
| Adapter, TC Gauge · 00-672017-00 |
| TC, Vacuum · 00-672017-01 |
| Tube, Inlet, Argon · 00-672117-00 |
| Cassette Rail, Rear · 00-672813-00 |
| T.C, Self Adhecive · SA1-J |
| Mask, CV, 5″ · 00-677813-02 |
| Air Filter Muffler · 00-671946-00 |
| Insert Rail, Rear · 00-674274-00 |
| Insert Rail, Front · 00-674275-00 |
| Table Shield · 00-674330-00 |
| Heater, DC Bias 5″ · 00-685943-01 |
| Roller, Flat Aligner · 00-678761-03 |
| Roller, Flat Aligner · 00-678772-01 |
| Roller, Flat Aligner · 00-678761-01 |
| Floodlight, Large · 67-489007-00 |
| Heater Sieve Trap · F2698301 |
| L/L Ram Seal Plate · 00-664440-01 |
| Tube, Assy. · 00-685918-00 |
| Mask Assy. CV Upgrade · 00-677908-06 |
| Insert, Perforated · 00-678477-01 |
| Screen, AY Millitorr · 00-626269-00 |
| Argon Tube Assembly · 00-678635-01 |
| Wafer Lifter, 6″ · 00-680534-00 |
| Mesh Trap · 00-685579-00 |
| Blank Off, Source · 00-680616-00 |
| Plate, L/L Ram Seal · 00-680074-02 |
| Cassette Rail Insert, Front · 00-680918-00 |
| Cassette Rail, Front · 00-680919-00 |
| Cassette Rail Insert, Rear · 00-680920-00 |
| Screen · 00-681084-00 |
| Heat Distribution Plate · 00-682547-00 |
| Insulation Material, Heater · 00-682550-00 |
| Insulator, RF Ceramic · 00-682884-00 |
| Screen, Hi-Vac Valve · 00-683293-00 |
| Insert, Table, RF Etch · 00-683445-04 |
| Panel · 00-683695-01 |
| Plt Mounting · 04-709285-01 |
| Screen, L/L ISO Valve · 00-684408-00 |
| Screen, L/L · 00-684689-00 |
| Rotational Feedthru · 00-684755-00 |
| Cap, Ignitor · 00-677829-02 |
| Light, Assembly KWR · 00-685388-00 |
| Shield, Ceramic, Heater T.C. · 00-685917-00 |
| Bar Pallet · 00-688156-00 |
| Molecular Sieve Material · 27-320035-00 |
| Bellows, Seal Body · 04-710424-01 |
| Insert Clip Ring · 04-714075-01 |
| Wafer Lifter Arm · 10-98800-01 |
| Bellows, Assembly · 1281-187838-301 |
| Hex Nut, 8, SS · 13-122008-00 |
| Master Link 3/8 · 20-479930-00 |
| Belt, Plastic Drive · 20-480029-00 |
| Key · 22-999783-00 |
| Plunger, Vilier · 22-999842-00 |
| Line, Argon, ViPS · 28-200704-00 |
| Hose Clamp · 28-993144-00 |
| Pump, Turbo, Varian · V-200A |
| Cover, Transducer Back · 71-625047-00 |
| Manual Valve · 951-5091 |
| Oil, TA, Turbo · 969-9901 |
| 5″ Flange Extension · 952-5048 |
| Cassette Rail Front · 00-672814-00 |
| Wafer Load Door, 5″ · 00-684170-00 |
| Wafer Lifter, 5″ · 00-674691-00 |
| Heater, 3290 5″ SST · 04-716542-01 |
| Absorber, Ebara · 31302000 |
| Pump, Cryo FS-8 · 03-230055-00 |
| Cryo Pump Hose · 3130020E |
| Array, 1st Stage · 07-601429-00 |
| Regulator, 0-30 PSI · 41500777 |
| Spray Lubricant · G-n |
| Plate, Temperature · 101-4-177C |
| TC, Vac Gauge · 270006 |
| Trap, RST-40V · 99-171-137 |
| Kit, Water Pump 1050 Cyropanel · 8080021K001 |
| Kit, Water Pump 1050 Cyropanel · 8080021K002 |
| Kit, Water Pump 350 Cyropanel · 8080021K003 |
| Filter Valve · 80250K031 |
| Kit, Rebuild 15K Array · 8080002K010 |
| Regulator, Pressure, L/L Valve · SP2339-1 |
| Fan · SU2A5 |
| Felt, Oil Reserve · PM033759-T |
| Wafer Stop Blade, 5″ · 00-678302-02 |
| Pressure Plate, Assy. · 00-684169-00 |
| Wafer Pick Up · 00-678317-01 |
| Heater Assy., 5″ SST · 00-685996-00 |
| Pressure Plate Assy. · 00-683162-00 |
| Transfer Plate Assy. · 00-683141-01 |
| Insulator, Anode · 00-664167-00 |
| Insulator, Cathode · 00-664166-00 |
| Belt, Timing · 20-480079-00 |
| Gas Feed Transition Tube · 00-677955-01 |
| Cassette, Wafer 4″ · 00-664394-00 |
| Table, Insert. 5″ · 00-674830-00 |
| Screen, Cryo Pump · 00-674850-00 |
| Bellows, LL Ram · 00-678274-01 |
| Wafer Stop Blade, 6″ · 00-678304-02 |
| Insulator, Mini-Qtm · 04-712078-02 |
| Tube Assy, Flex, Etch · 00-678552-01 |
| Cassette, 6″ Wafer · 00-681359-00 |
| Insert, External Pole Piece · 00-682232-00 |
| Insert, Middle Pole Piece · 00-682237-00 |
| Insulator, 6″ Heater · 00-682548-00 |
| Insulator, Pressure · 00-674827-00 |
| Wafer Stop Blade, 5″ SST · 00-674693-00 |
| Motor, DC · 73-410205-00 |
| Wafer Stop Blade, 4″ · 00-678303-02 |
| Kit B · 00-672744-00 |
| Tube, Ion Gauge · K2500-301 |
| Belt, Timing · 20-480081-00 |
| Heater Element, 6″ · 73-290938-00 |
| Cassette, Wafer 5″ · 00-684088-00 |
| Cooling Band, Outer · 00-682205-00 |
| Cooling Band, Inner · 00-682211-00 |
| Tube Assy, Flex Etch · 00-678552-02 |
| Rebuild Kit, Valve · 33-0119 |
| PCB’s |
| PCB, Relay · 00-685712-00 |
| PCB, RF Match · 00-657967-00 |
| PCB, 20 Input Sensor · 00-666082-00 |
| PCB, Audio Output · 00-684572-00 |
| PCB, Power Supply · 00-666361-00 |
| PCB, Output Vac. System · 00-663527-00 |
| PCB, Octal Relay · 00-668552-00 |
| PCB, 10 Input · 00-666055-00 |
| PCB, Input Board · 00-663529-00 |
| PCB, Control, Wide Range · 00-666368-00 |
| PCB, Argon Interface · 00-684041-00 |
| PCB, Reset Control · 00-663535-00 |
| PCB, Argon Pressure · 00-684037-00 |
| PCB, Power Fail · 00-666052-00 |
| PCB, Relay Control · 00-668550-00 |
| PCB, Audio Output · 00-684570-00 |
| PCB, Thin Film Head · 00-684584-00 |
| PCB, GPIB Interface · 00-666079-00 |
| PCB, Isolated Control Interface · 00-674639-00 |
| PCB, Power Supply · 44-149146-00 |
| PCB, Input · 00-666004-00 |
| PCB, Output · 00-666007-00 |
| PCB, Sensor Interface · 00-666085-00 |
| PCB, Cassette Motor Control · 00-666196-00 |
| PCB, Isolator Control · 00-666199-00 |
| PCB, Wafer Status · 00-666208-00 |
| PCB, Wafer Transfer · 00-666211-00 |
| PCB, Servo Control · 00-666273-00 |
| PCB, Relay Driver · 00-666291-00 |
| PCB, Power Control, 12kW · 00-666355-00 |
| PCB, Output Control · 00-671786-00 |
| PCB, Water Flow, 2.5 gpm · 00-671879-00 |
| PCB, Water Flow, .25 gpm · 00-671880-00 |
| PCB, RF Etch Monitor · 00-673526-01 |
| PCB, Interlock Stop · 00-678450-01 |
| PCB, Power Control 3kW · 00-686082-00 |
| PCB, Impedance Interface · 00-680682-00 |
| PCB, Power Indicator · 00-684661-00 |
| PCB, Relay, Time Delay · 71-625025-00 |
| PCB, Proteus Water Flow · 04-146378-00 |
| Pneumatic |
| Air Cylinder Rebuild Kit · 00-653460-00 |
| Cylinder, Clip Actuator · 00-664345-00 |
| Regulator/Filter Assy. · 27-189122-00 |
| Cylinder, Air · 00-672796-00 |
| Regulator, 50 PSI · 27-189162-00 |
| Bellows, Ram Shaft Assembly · 00-672852-00 |
| Cylinder, Air · 04-714147-01 |
| Cylinder, Air · 27-999664-00 |
| Cylinder, Assy., L/L Ram · 00-672859-01 |
| Actuator, Shutter · 00-683405-00 |
| Cylinder, Air, 5″ · 00-678319-01 |
| Cylinder, Stroke · 092-DP |
| Bellows, Ram Assembly · 00-680909-00 |
| Cylinder, Plastic Door · 00-683772-01 |
| Bellows, Ram · 00-664286-00 |
| Bellows, P/P Ram · 00-684095-00 |
| Valve, BTA · 00-677596-00 |
| BTA Valve Kit · 09-530090-00 |
| Cylinder, Air · 27-999600-00 |
| Dual Action Cylinder · 27-999650-00 |
| Cylinders, Bimba · 27-999657-00 |
| Cylinder, Air, 9″ · 27-999658-00 |
| Air Cylinder · 27-999665-00 |
| Muffler, Pneumatic 1/4 npt · 27-999700-00 |
| Cylinder, Air · 27-999740-00 |
| Cylinder, Air, Shutter · 27-999651-00 |
| Pump, Venturi · 00-670615-00 |
| Cylinder, Air · 00-678794-01 |
| Cylinder, Air · 27-300053-00 |
| Solenoid, 24 VDC · 04-709551-01 |
| Cylinder, L/L Ram 3290 · 04-714954-01 |
| Valve, Vacuum, L/L · 27-199811-00 |
| Vacuum Generator · 27-309504-00 |
| Cylinder, 10″ · 27-999748-00 |
| Power Supplies |
| exchange item RF Generator 1KW · RF 10S |
| Power Supply, SUDC · 00-672250-00 |
| Power Supply, 15VDC · HD 15-6-A |
| Power Supply · 78-590391-00 |
| Power Supply, 24VDC · CP162-A |
| Power Supply, 5VDC · HB5-3/OVP-A |
| Power Supply, 6KW · 00-681049-00 |
| Power Supply, 12KW · 04-722791-01 |
| Power Supply · 04-717511-02 |
| Power Supply, 24V -5V · 78-590383-00 |
| Power Supply, 5V 8A · HN5-9/OVP-A |
| RF Generator 500 W · RF 5S |
| Power Supply · X4010034 |
| Pumps |
| On-Board Water Pump · 8120818G001 |
| Cryo Pump Assy. · FS-8 |
| Shielding |
| Gage, Shield · 00-671683-00 |
| Shield, Inner Isolation · 00-685964-00 |
| Shield, Seal Plate · 00-664447-00 |
| Shield, Heater Blank Off · 00-684879-00 |
| Shield, RF Etch, 5″ · 00-685053-00 |
| Shield, Anode · 00-664267-00 |
| Shield, Ram Bellows · 00-664282-00 |
| Shield, P/P Ram · 00-684320-00 |
| Shield, L/L Particle Reduction · 00-680035-01 |
| Shield, RF Etch Ring · 00-674836-00 |
| Shield, Front Plate · 00-664347-00 |
| Shield, Screw Cavity · 00-683521-02 |
| Shield, Upper Chamber, 2 pcs · 04-716736-01 |
| Shield, Rear Plate · 04-712093-03 |
| Shield, 5″ P/P Cavity · 00-674780-00 |
| Shield, Ceramic Ring 4″ · 00-677895-01 |
| Shield, Dark Space · 04-715876-01 |
| Clip · 00-677815-01 |
| Shield, Cavity · 00-678216-00 |
| Shutter · 00-678474-00 |
| Sheild, Cross Contamination · 00-685957-00 |
| Ion Gauge Baffle · 04-716545-01 |
| Shield, P/P Cavity · 04-717627-01 |
| Shield, Baffle · 04-711877-01 |
| Shield, Preheat Cover · 00-681028-00 |
| Shield, Load Lock · 00-678067-01 |
| Shield, RF Igniter Flange · 00-681176-00 |
| Shield, Ceramic Ring, 6″ · 00-683707-01 |
| Shield, Heater Flange · 00-684747-00 |
| Kit, CV Mask, 5″ · 00-677908-06 |
| Shutter · 00-685485-00 |
| Table Shield 5″ · 00-685951-00 |
| Shield, ViPS Can · 04-710446-06 |
| Shield, P/P Ram w/Insert · 04-712094-01 |
| Shield, L/L Ram w/Insert · 04-712094-02 |
| Shield, L/L Ram Cone · 04-712159-01 |
| Shield, Center Ram · 04-712188-01 |
| Shield, Upper Chamber · 04-712190-01 |
| Shield, Screw · 04-712209-01 |
| Shield, Dark Space · 04-715761-02 |
| Shield, Lower Chamber · 04-717647-01 |
| Shield, Feedthru, ViPS · 04-717624-00 |
| Feedthru, Filament · 04-717624-01 |
| Shield, Filament Feedthru · 04-717625-01 |
| Shield, 6″ RF Cover · 04-721165-01 |
| Feedthru, Rotary Shutter · 28-274973-00 |
| Feedthru, Hi-Voltage 12kV · 954-5119 |
| Cassette, Clip Tool · CV-1.250 |
| Shield, Lower Isolation · 00-685936-00 |
| Shield, Long · 00-685938-00 |
| Shield, ST2-3L · 00-685957-01 |
| Shield, Secondary · 00-674846-00 |
| Shield, Front Plate, 2 pcs · 00-664337-00 |
| Shield, Rear Plate · 00-664119-00 |
| Shield, RF Etch, inner · 00-671954-00 |
| Shield, Outer Pole Piece · 00-672313-00 |
| Shield, Conmag Combo · 00-673816-00 |
| Anode Cap · 00-674163-00 |
| Shield, ST3-4S · 00-685937-01 |
| Ceramic Clip Ring, 5″ · 00-674782-00 |
| Shield, 5″ Heater, Mini-Qtm · 04-712263-01 |
| Insert, Table RF 4″ · 00-674281-00 |
| Shield, 5″ Heater Bore Mini-Qtm · 04-712264-01 |
| Ceramic Clip Ring, 5″ CV · 00-677814-02 |
| Shield, RF Etch Cover · 00-680703-00 |
| Shield, 4″ P/P Cavity · 00-664219-00 |
| Shield, ST2-3S · 00-685958-00 |
| Shield, Conmag Modified · 00-684278-01 |
| Shield, Conmag Modified · 00-684278-02 |
| Shield, Anode Cover · 00-664198-01 |
| Shield, Ceramic Ring · 00-684145-01 |
| Shield, Heater Bottom · 00-684725-00 |
| Shield, Heater Bottom · 00-684728-00 |
| Ceramic Clip Ring , 6″ · 00-682216-00 |
| Shield, Heater 4″ · 00-684718-00 |
| Shield, Ceramic Ring, 5″ · 00-684145-00 |
| Shield, Conmag · 00-684278-00 |
| Shield, Split Clamp Ring · 00-684281-00 |
| Weldmont, P.P. Shield · 00-684325-00 |
| Shield, Heater, 5″ · 00-684748-00 |
| Kit, Shields, Aluminum · 00-674780-02 |
| Ceramic Clip Ring, 4″ · 00-674505-00 |
| Shield, Heater, 5″ W/Flange · 00-684748-02 |
| Shield, Table, W/O Slit · 00-685951-01 |
| Shield, Pressure Plate · 00-685965-00 |
| Shield, 6″ Heater Bore · 04-712165-01 |
| Shield, Conflat Hole · 04-712083-01 |
| Shield, P/P Ram Tip · 04-712156-01 |
| Collar, P/P Ram Pad · 04-712186-01 |
| Shield, 6″ Heater · 04-712199-01 |
| Shield, Shutter, F/T · 04-712083-03 |
| Shield, NC · 04-714049-02 |
| Shield, Cavity, 6″ · 04-715865-01 |
| Shield, Pressure Plate · 04-715866-01 |
| Ring Assy., Etch 5″ · 00-684694-00 |
| Shield, RF Etch · 00-680701-00 |
| Shield, Heater 6″ · 04-712166-01 |
| Shield, 5″ Ceramic Ring · 00-677842-01 |
| Shield, Outer Support · 00-682938-00 |
| Shield, P/P Weldment 4″ · 00-684257-00 |
| Shield, Heater Bore 5″ · 04-716544-00 |
| Shield, Heater Bore 3290 5″ · 04-716544-01 |
| Shield, Exterior Source 3280 · 00-680902-01 |
| Shield, Pressure Plate, 3280 · 04-716410-02 |
| Shield, 6″ Cavity Shield, 3280 · 00-680574-00 |
| Shield, Screw · 00-681395-00 |
| Shield, Pressure Plate, Qtm · 04-721198-01 |
| Shield, Belly Conmag II · 04-712161-01 |
| Shield, No ViPS · 04-712083-02 |
| Shield, Load Lock · 00-678638-01 |
| Shield, Front Plate, 3290, 2 pc. · 00-683155-00 |
| Valves |
| Valve, Solenoid 24VDC · 27-179918-00 |
| Valve, Needle · 951-509 |
| Valve, Pancake · 27-999671-00 |
| Valve, Quick Exhaust · 27-200020-00 |
| Valve, Assy. · 00-672217-00 |
| Valve, Argon Kit · 00-672243-00 |
| Valve, Needle · 27-180250-00 |
| Valve, Shut Off 1/4 · 27-109601-00 |
| Valve, 11/2″ Pneumatic · 00-684383-00 |
| Valve, Argon Pressure · 00-674923-00 |
| Valves, Vacuum · ESVP-1502-NWB |
| Valve, Solenoid, 120VAC · 27-179814-00 |
| Bellows Valve · SS-BN4405 |
| Bellows Valve · SS-BNV4682 |
| Valve, Soleniod 120V · 27-179916-00 |
| Valve, Needle Argon Station · 00-674766-00 |
| Valve, Solenoid 120V · 27-179917-00 |
| Valve, Metering · EF-20B |
| Valve, Solenoid, 120V · 27-179903-00 |
| Valve, Needle Etch Head · 00-678619-01 |
| Valve, Manifold Assy. · 00-674567-00 |
| Valve, Flow Control · 00-683761-01 |
| Solenoid, 24VDC · 00-684044-00 |
| Valve, Needle, Preheat · 04-720432-01 |
| Solenoid, Kit · 1291-6267-71-190 |
| Valve, Solenoid, Elevator · 27-179816-00 |
| Valve, Subbase 231B · 27-179818-00 |
| Solenoid, 24VDC · 27-179819-00 |
| Valve, Solenoid · 27-179919-00 |
| Valve, Solenoid · 27-180194-00 |
| Valve, Flow Control · 27-180254-00 |
| Valve, Needle · 27-180475-00 |
| Valve, Needle · 27-180476-00 |
| Valves, Flow Control · 27-180478-00 |
| Valve, Secvac 115vac · 283-11B1 |
| Valve, Pressure Relief · 04-716531-01 |
| Valve, 4 way 24Vdc · 62-4E1-36-70 |
| Valve, CTI Poppet · 8080250K045 |
| Valve, Needle 1/4 Straight · B-45G |
| Valve, Hi-Vac · Q1089-305 |
| Valve, Hi-Vac · X9-515229-00 |
| Regulator, Water · 27-189139-00 |
| Valve, NW-40 · 00-678254-01 |
| Cylinder, L/L Ram 3180 · 04-714953-01 |
ID-SS10770-S-1
