RF Fab Line Equipment and Product Info.

Description

Fab Line Equipment and Product Info. for RF/Microwave Si BJT Power Devices & Pallets , RF/Microwave Silicon Diodes , MEMS Devices

Valid Time: Subject to prior sales without notice. Appreciate your time!

Info in detail: download

Video for your reference: Link at WIX

Name: RF Fab Line

Located: Silicon Valley , CA USA.

Status: Fab was shut down in 2021. All equipment were deinstalled and move to the storage at Silicon Valley in December, 2021. Equipment were plastic wrapped, metal banded, strapped and on skids/pallets(Heat treated already).

Info on products: The deal includes products design sheets , run travelers, recipes on the equipment.

Fab History and Capability: There are 5 product families that this fab produced. The site mostly used the 3” and 4” wafers, and they can produce between Qty 1,000 and 10,000 components per 3” wafer depending on the product family. This site only ran a single shift as well and WIP level was about 800-1000 wafers per month. A new owner can ramp up by running 2-3 or more shifts and have been utilization. Also can add more systems to increase throughput.

About 90% of the equipment is capable of 6” and even some is capable of 8” such as the AMAT and MRC’s as an example. This site never ran 8”, but they did run some lower quantities of 5” and 6” over the years. There are 18 tubes of capacity on the furnace stacks. 3 of them are LP (low pressure) and 3 of them are also set up for 6”. The equipment set is older and was well maintained, they exceed their numbers on the production so didn’t ramp up. They did talk about a few times but it never happened officially. This fab made a lot of money just on the 5 product families they produced. With some minor reconfiguration this fab could produce a lot of different by similar products. Or it could be converted and run SiC or GaN, or MEM’s if so desired.

Equipment List:

#	Type	Vendor	Model #	Purpose
1	P5000	AMAT	P5000	PECVD
2	Particle Counter	FSM	8800	Particle count
3	Etcher	PlasmaLab		Plasma Etch
4	PVD	MRC	902M	2 Target PVD
5	PVD	MRC	902M	2 Target PVD
6	PVD	MRC	603C	3 Target PVD
7	Ellipsometer	Rudolph	Auto-EL	Measurements
8	CV Junction	MDC	490	Epi Reader
9	Thin Film Meas	Metricon	2010M	Measurements
10	Measurements	Nanometrics	010-0180	Measure Thin Film
11	Thin Film Meas	Filmetric	205-6073	Measure Thin Film
12	Surface Profiler	Tencor	Alpha 500	Thickness Meas
13	Plasma Etcher	Technics	Planar Etch II	Plasma Etch
14	Plasma	Technics	500-II	Asher
15	Stepper	GCA	ALS 200	Aligner
16	Measurements	Micro Metric	Microline 100	CD Measurements
17	Microscope	Leitz		Inspection
18	Microscope	Zeiss	4727100000/01	Inspection
19	3″ Scrubber	C&D	custom built	wafer scrubber
20	Tempress	LPCVD/Diff	8 Stack	Furance
21	Tempress	Diffusion	8 Stack	Furnace
22	HMDS	YES	LPIII	hmds
23	HMDS	YES	LPIII	hmds
24	Probe Station	Baush and Lomb		DC Measurements
25	Resist Coater	SVG/C&D	N/A	Coat Resist
26	9 Sinks with rinser			rinse and dry wafers
27	8 wafer dryers	Semitool		Drying wafers
28	18 LFH			Fab
29	18 Lab Tables			Fab
30	Chemial Storage	Yellow Cabinet		2 Target Chemial Storage
31	5 Chemical Carts			Wet Bench
32	Particle Monitor	PMS		Fab Counter
33	Evaporator	CVC?	Manual load	Metal evaporator
34	Denton		Sputter	Sputter
35	Genesis	Microstar	Vac Oven	Vacuum Oven
36	HFS	DZF-6020-T	Vac Oven	Vacuum Oven
37	SEM	Hitachi	800	SEM
38	Wafer Sorter	Nex Gen	1034XS D45
39	Wafer Sorter	Nex Gen	1034XS
40	Oven	Blue M	5
41	TGO	Honeywell	CM4
42	Chiller	Infinity
43	Chiller	Infinity
44	Desiccators	Unknown	qty 6-8