Plasmatherm VLR RIE

Plasmatherm VLR RIE

• Plasmatherm VLR RIE module
• Single wafer manual load system
• no Load Lock.  RIE system
• Alcatel turbo with  controller,
• Gate Valve
• Advanced Energy RF5S 500W RF 13.56MHz power supply with match work and tuner.
• 11″ lower platen
• 13″ shower head
• four Mass Flow Controllers (but additional ones can be added for an additional fee)
• System can be purchased as is or we can offer refurbishment, installation & training for an additional fee.
• PC upgrade is also available.
• Service and Support Available.