Description
Plasmatherm Versaline PECVD Deposition System
Plasmatherm VLR (Versaline) 7000 series
Cassette to Cassette PECVD Deposition system. (1) LM/TM module & (1) PECVD Module.
Can run up to 8″ dia. wafers.
Cassette to Cassette Load Lock with robot transfer into PECVD module.
PECVD module consist Plasmatherm OS with a Watlow Six Zone Chamber heat controller,
Advanced Energy RF5S – 500W RF lower Electrode power supply with match work and tuner.
Currently set up with four Mass Flow Controllers
Can offer System refurbished, operational or As is, where is.
Can offer installation & training as well.
SS181761256100
