Description
Plasmatherm SLR 720 RIE Etching System
- Plasmatherm SLR RIE module
- Manual Load Lock System
- 11″ Lower electrode RIE system
- 11″ shower head with optional bias or grounding on upper chamber
- Leybold 361C turbo with Leybold 150/300 controller,
- MKS Gate Valve
- Advanced Energy RF5S 500W RF 13.56MHz power supply with AM5 match work and PS-2 controller
- six Mass Flow Controllers (CL2, CHF3, CF4, Ar, O2 & N2) System has capabilities of 8 MFCs total.
- Windows OS Platform with Plasmatherm Sysmon software.
- Can offer installation & training as well.
- Service and Support Available.
SS182244594283
