Description
Plasmatherm PECVD PT530 System
- Plasmatherm PT530 PECVD system,
- Single wafer manual load system with an 8″ lower electrode
- no Load Lock
- RF power supply – 13.56MHz with match work and tuner.
- four Mass Flow Controllers (but additional ones can be added for an additional fee)
- System can be purchased as is for the price listed or we can offer refurbishment, installation & training for an additional fee.
- PC upgrade is also available.
- Service and Support Available.
SS181839774191
