Description
PLASMATHERM 790 RIE
MODEL 790
Non load-locked chamber
Electrodes: 240mm diameter
Max wafer size capable: 8″/200mm
RFPP 500W RF Generator
500W RF Match
AMN Power Supply
ION Gauge Controller Type 290
Leybold 361C Turbo Pump (Qty 1)
Leybold NT 150/360 Controller
SS112473611577
