Plasma Therm Versaline RIE- Reactive Ion Etching System

Plasma Therm Versaline RIE- Reactive Ion Etching System

Plasma Therm VLR (Versaline) 7000 series Cassette to Cassette RIE system. (1) LM/TM module & (1) RIE Module.  Can run up to 8″ dia. wafers.  Cassette to Cassette Load Lock with robot transfer into RIE module. RIE module consist of a Leybold 361C turbo pump with Leybold controller, MKS throttle valve with controller, Advanced Energy RF10S – 1000W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers