Main Maker

PlasmaTherm 790RIE

Description

PlasmaTherm 790 Series Reactive Ion Etching / Plasma Enhanced System RIE
Model: 790 10 RIE / PE MN Fr, Serial# PTI78289
Including: Leybold D40BCS, Neslab HX75 Chiller, Manuals. Pls contact us for more info if necessary. Appreciate your time!
Gases Used: Ar, SF6, N2, O2
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working. System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.

The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.

Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz
Plasma-Therm 790 PECVD upper Electrode Low Freq. &  Lower electrode High Freq.
Plasma-Therm 790 RIE Parts tool
Plasma-Therm 790 PECVD
Plasma-Therm 790 PECVD
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm SLR 720 RIE
Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD
Plasma-Therm VLN (Versaline) ICP – single wafer manual load
Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load
YESHMDS Class 10 – all Stainless Steel

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ID-SS380-OEM-2

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