Description
PlasmaTherm 790 Series Reactive Ion Etching / Plasma Enhanced System RIE
Model: 790 10 RIE / PE MN Fr, Serial# PTI78289
Including: Leybold D40BCS, Neslab HX75 Chiller, Manuals. Pls contact us for more info if necessary. Appreciate your time!
Gases Used: Ar, SF6, N2, O2
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working. System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
Complete, working, functional test is available at extra cost.
The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale.
Plasma-Therm | Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz |
Plasma-Therm | 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. |
Plasma-Therm | 790 RIE Parts tool |
Plasma-Therm | 790 PECVD |
Plasma-Therm | 790 PECVD |
Plasma-Therm | SLR 720 RIE |
Plasma-Therm | SLR 720 RIE |
Plasma-Therm | SLR 720 RIE |
Plasma-Therm | SLR 720 RIE |
Plasma-Therm | SLR 720 RIE |
Plasma-Therm | VLR VersaWorks Cluster tool- one chamber PECVD |
Plasma-Therm | VLN (Versaline) ICP – single wafer manual load |
Plasma-Therm | VLN (Versaline) ICP – two wafer Brooks handler – manual load |
YESHMDS | Class 10 – all Stainless Steel |
ID-SS380-OEM-2