Description
Perkin-ELmer 4450 Sputtering System
Perkin Elmer Sputtering System 4450
3 Target System
(Delta Configuration, For High Uniformity on up to 6″ Wafers)
RF Power Supply
DC Power Supply
Turbo Pumped Load Lock
CTI Cryopump (Rebuilt) and Compressor
LH D65B Dual Stage vacuum Pump
SS152560839396 and SS152552100366
