Description
Perkin Elmer 4400 Sputtering System / Perkin Elmer 4400 Sputter system.
(3) Delta target Configuration:
RF etch
CTI On board 8 Cryopump with Fast Regen Controller
Advanced energy RFG 1250 RF power supply
Advanced Energy RFG/AZX RF controller
307 Granville Phillps Ion Gauge Controller
MKS 270 Signal Controller
SS182223127921
