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Perkin Elmer 4400, 3 target DC or RF magnetron sputtering system

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Perkin Elmer 4400, 3 target DC or RF magnetron sputtering system

Perkin Elmer 4400, 3 target DC or RF magnetron sputtering system, with load lock, cryo-pump, and bias pre-etch capability. It is a manual system.

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