Description
Oxford Instruments 80 Plasma Etcher Plasma Asher RIE System
The system has the following components:
2 Each ENI ACG3 13.56 MHz RF Supplies
1 Each BOC Edwards EXT Turbo Pump with EXC300 Controller
1 Each MKS 600 Series Pressure Controller
1 Each MKS Throttle Valve
Two Each ENI RF Matching Network One Upper Electrode – One Lower Electrode
One Each Edwards Rough Valve
One Each Edwards Active Gauge
One Each Advance Energy PC 5000 Processor Controller [Missing Parts]
Chamber Hoist
Upper & Lower Electrodes
SS132110068121
