Description
Novellus Inova XT PVD 300mm Wafer, Complete Tool
Quantity: 1 set
Location: CA USA, SS6305W
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: Used.
Product info for your reference:
– MAG7 Brooks Robots
– MC3 Novellus Module controller
– Pfeiffer Turbo and turbo controller
– 3 CTI/Hilex/Brooks Cryo pump
– Brooks FOUP cassette wafer loader
– VAT throttle valve and controllers
– AE PDX 5000 RF Generator
– AE RFG 5500 RF Generator
– MKS RF Generator
– DC power supply
– Right Degas Chamber
– PVD chamber
– Preclean Chamber
– Left Degas Chamber
– Transfer Module with dual blade
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
