Novellus Gasonics PEP Iridia DL Plasma Asher

Novellus Gasonics PEP Iridia DL Plasma Asher

• Through-the-Wall Installation
• Wafer Handler: PEP 4800DL(H)
• Build Configuration: 95-0526
• Dual Cooling Stations
• Kensington DUAL MULTI-LINK Robot
• Controller Model 4000C, s/n 97-396-96
• Controller: IBM 7587 w/CD-ROM
• 208VAC, 60Hz, 3Phase WYE, 30A
• Left Module: PEP4800DL (L)
• Build Configuration: 51-2035
• Astex Microwave Generator
• ENI ACG-5XL RF Generator
• Process Controller: IBM 7587
• Gas Configuration: CF4, N2, 4 percent H2/N2, O2, CF4, N2
• Right Module: PEP-4800DL (R)
• Build Configuration: 51-2036
• Astex Microwave Generator
• ENI ACG-5XL RF Generator
• Process Controller: IBM 7587
• Gas Configuration: CF4, CF4, N2, CDA, N2, O2, 4 percent H2/N2.