Description
MRC 942 Sputter System
- Load locked, 2 target sputter system. Handles substrates up to 12″ square. Present targets are ITO and TiW, but can be changed to buyer preference. Main chamber is cryo-pumped, and the load lock is heated. Subsystem details are:
- CTI Cryo-torr 8 cryopump
- CTI Cryogenics 8200 cryo-compressor
- ITO Target
- TiW target
- Huttinger PFG-300 RF power supply
- Advanced Energy MDX DC power supply
- GE / Fanuc Programmable Logic Controller
SS131899882406
