Main Maker

March PX1000 plasma asher

Description

March PX1000 plasma asher with ENI ACG-10B 1000W Rf generator

ENI ACG-10B 1000W Rf 13.56mhz generator

2 powered shelves

Porter Masss flow controllers:

1000 SCCM N2

500 SCCM N2

Low pressure gas auto-shut off (see small box on top of asher) with 2 gas pressure sensors

 

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