Description
March PX1000 plasma asher with ENI ACG-10B 1000W Rf generator
ENI ACG-10B 1000W Rf 13.56mhz generator
2 powered shelves
Porter Masss flow controllers:
1000 SCCM N2
500 SCCM N2
Low pressure gas auto-shut off (see small box on top of asher) with 2 gas pressure sensors
SS172828794301